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Photonic crystal waveguide terahertz modulator for modulating terahertz waves at high speed

A photonic crystal waveguide and photonic crystal technology, applied in the field of terahertz applications, can solve the problems of low modulation rate, narrow modulation bandwidth and small modulation depth of the terahertz modulator, achieve short response time, realize multi-working window intensity modulation and Frequency modulation, the effect of large modulation bandwidth

Inactive Publication Date: 2014-01-01
NANKAI UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] The purpose of the present invention is to provide a photonic crystal waveguide terahertz modulator capable of high-speed modulation of terahertz waves, to solve key technical problems such as narrow modulation bandwidth, low modulation rate, and small modulation depth of the terahertz modulator in the background technology

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  • Photonic crystal waveguide terahertz modulator for modulating terahertz waves at high speed
  • Photonic crystal waveguide terahertz modulator for modulating terahertz waves at high speed
  • Photonic crystal waveguide terahertz modulator for modulating terahertz waves at high speed

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Embodiment Construction

[0020] The working process of the present invention is illustrated with an example of a high-speed photonic crystal waveguide terahertz modulator working near 1THz:

[0021] like figure 1 As shown in (a), the silicon used in the silicon photonic crystal column is high-resistance silicon, with a resistance value above 6000Ω·cm. On a 0.4mm thick double-sided polished high-resistance silicon wafer, the MEMS ion beam deep etching process is used to obtain a silicon photonic crystal column array. The column height is 100 μm, the column diameter is 100 μm, the distance between adjacent columns is 160 μm, the silicon substrate is 300 μm thick, 10 mm long, and 4 mm wide. . The magnetron sputtering method is used to coat a layer of metal vanadium on the processed silicon photonic crystal column, and then an oxidation method is used to convert the metal vanadium into a vanadium dioxide film. The conductivity of the vanadium dioxide film in the dielectric phase is less than 0.1 (Ω·cm) ...

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Abstract

The invention discloses a photonic crystal waveguide terahertz modulator for modulating terahertz waves at high speed. The surface of a silicon photonic crystal pillar array of wired defect waveguide is plated with a layer of vanadium dioxide film, the vanadium dioxide film without laser irradiation at room temperature is a medium phase and the member shows a band gap property of medium photonic crystal waveguide; when the surface of the photonic crystal pile is irradiated by laser, phase change occurs to the vanadium dioxide film and a member shows a bond gap property of metal photonic crystal waveguide. Because the conduction bands of the medium and the metal photonic crystal waveguide of a same structure are completely different, the terahertz strength modulation and frequency modulation of a light-controlled high speed broad bond can be realized. The terahertz modulator modulates the bond width largely, that is, more than 100GHz; the modulation mode is flexible and various and can realize multi-window strength modulation and frequency modulation; the modulation depth is more than 90%; the response time is short and the modulation speed is 100Gbps; and the structure and the modulation method are simple and convenient for minimization and integration, and can meet the requirement on a terahertz communication system.

Description

technical field [0001] The invention belongs to the technical field of terahertz applications, and in particular relates to a high-speed photonic crystal waveguide terahertz modulator and a modulation method thereof. Background technique [0002] Terahertz (THz, 1THz=10 12 THz) waves refer to electromagnetic waves with a frequency ranging from 0.1 to 10 THz (corresponding to a wavelength of 3 mm to 30 μm). This band is between microwaves and light waves, and is an intersecting field between electronics and photonics. Due to its special position in the electromagnetic spectrum, terahertz waves have many superior characteristics such as perspective, safety, and high signal-to-noise ratio, and have very important academic and application values ​​in the fields of spectroscopy, imaging, and communication. Terahertz communication has the advantages of rich frequency band resources, large bandwidth, good confidentiality, and anti-electromagnetic interference. It can realize indoo...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02F1/025
Inventor 范飞常胜江
Owner NANKAI UNIV
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