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Multi-parameter water quality monitoring integrated microarray electrodes and preparation method

A microarray electrode and multi-parameter technology, which is applied in the direction of measuring devices, calorie measurement, microstructure technology, etc., can solve the problems of restricting instrument integration, miniaturization, existing improvement space, electrode application limitations, etc., to achieve mature processing technology, Improved selectivity and low production cost

Inactive Publication Date: 2012-06-13
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

At present, Ag / AgCl electrodes and saturated calomel electrodes are mostly used in electrochemical sensors. Among them, the saturated calomel electrode contains mercury, a toxic substance, so the application of this electrode is limited.
At this stage, the Ag / AgCl electrodes used in microelectrode sensors are generally an externally connected finished electrode, which will limit the integration and miniaturization of the instrument, and there is room for improvement

Method used

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  • Multi-parameter water quality monitoring integrated microarray electrodes and preparation method
  • Multi-parameter water quality monitoring integrated microarray electrodes and preparation method
  • Multi-parameter water quality monitoring integrated microarray electrodes and preparation method

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Embodiment Construction

[0028] The specific embodiments of the present invention will be further clarified below in conjunction with the accompanying drawings to describe the substantive features and remarkable progress of the present invention.

[0029] 1. Preparation method of platinum microarray electrodes

[0030] 1) Fabrication and patterning of platinum electrodes ( figure 2 )

[0031] The platinum electrode is manufactured using the lift-off process, and the specific process steps are as follows:

[0032] a. Clean silicon wafer

[0033] Place the wafer in 30% H 2 o 2 : Concentrated sulfuric acid=1:10 cleaning solution, after cleaning, blow dry with nitrogen, and dry (200°C, 30min).

[0034] b. Glue

[0035] Plasma treatment is carried out before coating to enhance the adhesion between substrate and photoresist. Use positive photoresist AZ4620, rotation speed: 2500rpm, time: 30s.

[0036] c. Pre-baking

[0037] Place the silicon wafer spin-coated according to step b on a hot plate at ...

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Abstract

The invention relates to multi-parameter water quality monitoring integrated microarray electrodes and a preparation method. The invention is characterized in that the microarray electrodes are fabricated on an oxidized wafer. According to the invention, a Pt thin film is used as a substrate of the microarray electrodes, photosensitive polyimide is used as an insulation layer, electrode sites are exposed by using photoetching, and other parts of the microarray electrodes are insulated; an electrochemical modification method is used for electrodeposition of Ag / AgCl and IrOx films on bare electrodes so as to respectively form reference electrodes and pH test electrodes, thereby realizing determination of temperature, oxidation reduction potentials, conductivity and pH values. The preparation method comprises production of the micro-array electrodes, preparation of the Ag / AgCl reference electrodes and preparation of the pH electrodes. Integration and miniaturization of the microarray electrodes provided in the invention are convenient.

Description

technical field [0001] The present invention relates to a multi-parameter water quality monitoring integrated microarray electrode and its preparation method. More precisely, the present invention relates to an integrated Ag / AgCl reference electrode for water quality monitoring integrated sensor and its manufacturing method. rate, oxidation-reduction potential and pH value, etc., which belong to the field of microfabrication and sensors. Background technique [0002] Oxidation Reduction Potential (ORP) is a comprehensive result of redox reactions between various oxides and reducing substances in water, and is a comprehensive indicator. This indicator can help people understand the electrochemical characteristics of water quality, analyze the properties of water bodies, and make decisions on prevention or treatment; conductivity is also widely used in water quality monitoring in power plants, chemical and sewage treatment departments; pH is used as a measure The standard of ...

Claims

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Application Information

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IPC IPC(8): G01N27/333G01K7/16B81B7/04B81C1/00
Inventor 金庆辉张缓缓陈强张洹千赵建龙
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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