MgZnO/N-propyl bromide (NPB) ultraviolet light detector and producing method thereof
A technology of ultraviolet light and detectors, applied in the field of optoelectronic information, can solve the problems of low organic electron mobility, p-type doping of inorganic wide bandgap semiconductors, etc.
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[0018] A MgZnO / NPB ultraviolet light detector, the ultraviolet light detector is a single-phase Mg grown on a quartz ITO substrate x Zn 1-x O thin film, NPB thin film, LiF thin film and electrode. The single-phase Mg x Zn 1-x In O, X=0.1-0.4, and the thickness is 200-350nm; the thickness of the NPB film is 50-120nm; the thickness of the LiF film is 0.5-2nm.
[0019] A kind of MgZnO / NPB ultraviolet photodetector manufacture method one, the step of this method comprises:
[0020] Step 1 imports the cleaned quartz ITO substrate into the pre-growth chamber of MBE;
[0021] Step 2: Treat in the pre-growth chamber at 750°C for 30 minutes;
[0022] Step 3. The quartz ITO substrate processed in step 2 is introduced into the growth chamber of MBE, and at a growth temperature of 400°C, Mg with a thickness of 200nm is grown. x Zn 1-x O film, where X=0.1;
[0023] Step 4 will Mg x Zn 1-x The O thin film is introduced into the thermal evaporation, and the Mg x Zn 1-x On the O f...
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