Etching solution composition for transparent conductive film

A technology of transparent conductive film and etching solution, which is applied in the direction of surface etching compositions, circuits, electrical components, etc., and can solve the problems of non-crystalline ITO film etching, unusability, and insufficient practicality, etc.
CN102732254AInactive Publication Date: 2012-10-17KANTO CHEM CO INC
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
KANTO CHEM CO INC
Publication Date
2012-10-17
Estimated Expiration
Not applicable · inactive patent

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Abstract

The present invention provides an etching solution composition for etching crystalline transparent conductive films which enables etching of a crystalline ITO film without damaging copper and / or copper alloy used in electrode materials. Etching solution compositions for etching crystalline transparent conductive films described herein is consist of an aqueous solution that comprises 1-10 wt % of a fluorine compound.
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Description

technical field

[0001] The present invention relates to an etchant composition used for a transparent conductive film in a display device of an FPD (flat panel display), a solar cell, an electrode of a touch panel, and the like. More specifically, it relates to the etching of transparent conductive films for touch panels using organic polymer films such as polyethylene terephthalate (PET) as substrates, transparent conductive films, and copper and / or copper alloy films. liquid composition. Background technique

[0002] The transparent conductive film is a light-transmitting conductive material used in FPDs such as LCDs (liquid crystal displays) and ELDs (electroluminescence displays), solar cells, touch panels, and the like. These transparent conductive films include indium tin oxide, indium oxide, tin oxide, zinc oxide, etc., and indium tin oxide (hereinafter referred to as ITO) is mainly widely used.

[0003] Conventionally, an amorphous ITO film formed on a glass substr...

Claims

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