Thermocouple and forming method of thermocouple

Abstract

The invention discloses a thermocouple and a forming method of the thermocouple. The method comprises the following steps: providing a substrate; forming a dielectric layer on the substrate; forming a metal layer on the dielectric layer; carrying out photoetching and etching on the metal layer to form a first pressure welding block, a second pressure welding block and a thermocouple metal strip, wherein the second pressure welding block is connected with the thermocouple metal strip; forming a carbon-based film on the dielectric layer, wherein one end of the carbon-based film is contacted with the pressure welding block and the other end of the carbon-based film is contacted with the thermocouple metal strip; forming a first metal contact on the first pressure welding block; and forming a second metal contact on the second pressure welding block. According to the thermocouple and the forming method of the thermocouple, by adopting graphene, the thermocouple has a high seebeck coefficient and can be modulated by gate voltage, so that the produced thermocouple has high sensitivity; the carbon-based film formed by using air pressure is flat, compact and good in quality; the working procedures after forming the carbon-based film are few, the carbon-based film is less stained or damaged; and the finally formed electrode with two-side clamp structure is high in intensity and low in contact resistance.

Description

Technical field [0001] The invention relates to the field of temperature measurement, in particular to a thermocouple and a forming method thereof. Background technique [0002] Infrared detectors have a very broad application field, which can be used for non-contact temperature measurement, gas composition analysis, non-destructive inspection, thermal image detection, infrared remote sensing, and military target reconnaissance, search, tracking and communication. The basic principle of thermocouple temperature measurement is that two conductors of different components form a closed loop. When there is a temperature gradient at both ends, current will flow through the loop. At this time, there is an electromotive force-thermoelectromotive force between the two ends. It is the so-called Seebeck effect. Among them, the magnitude of the thermoelectromotive force has a positive correlation function with the temperature difference, so the measured temperature can be calculated by det...

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Problems solved by technology

Due to the large temperature coefficient of resistance of the above materials, low conductivity, large specific heat, poor linear relationship between th

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