Metal film bridge igniter and preparation method thereof

A metal thin film and alloy thin film technology, applied in the field of electrical fireworks, can solve the problems of reducing the reliability level of the bridge wire igniter, affecting the ignition performance of the igniter, and the bridge wire igniter being unable to meet the requirements, so as to reduce the working energy. and ignition time, simple and reliable processing technology, and the effect of improving energy utilization efficiency

Inactive Publication Date: 2013-02-13
48TH RES INST OF CHINA ELECTRONICS TECH GROUP CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] Usually, the bridge wire type electric pyrotechnic igniter is the ignition method that people have been commonly used. It is composed of a suspended resistance heating wire and two electrodes connected. The igniter with this structure can , the radial stretching effect of the bridge wire is likely to cause the deformation of the bridge wire, resulting in a change in the resistance of the bridge wire, which affects the ignition performance of the igniter, and may cause the breakage of the bridge wire and the cracking and desoldering of the solder joints, resulting in misfiring of the igniter, which is extremely The reliability level of the bridge wire igniter is greatly reduced, and the bridge wire igniter generally cannot meet the requirements of low ignition energy and rapid ignition

Method used

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  • Metal film bridge igniter and preparation method thereof
  • Metal film bridge igniter and preparation method thereof
  • Metal film bridge igniter and preparation method thereof

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Experimental program
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Effect test

Embodiment 1

[0035] see Figure 1 to Figure 4 , the metal thin film bridge igniter 1 includes a substrate 2, a transition layer 3 disposed on the substrate 2, a thermal isolation film 4 disposed on the transition layer 3, a metal resistance film 5 disposed on the thermal isolation film 4, The electrode film 6 provided on the resistive film 5 is provided in the through hole 13 on the electrode film 6 .

[0036] Wherein, the material of the substrate 2 is polyimide, with a diameter of 100 mm to 400 mm and a thickness of 30 μm to 200 μm; the material of the transition layer 3 is Ta 2 o 5 , with a thickness of 0.05 μm to 0.1 μm; the material of the thermal isolation film 4 is SiO 2 , the thickness is 0.1 μm-1 μm, the material of the metal resistance film is Ni-Cr (8:2) alloy, the thickness is 0.2 μm-4 μm, the material of the electrode film 6 is Au, the thickness is 0.05 μm-0.1 μm.

Embodiment 2

[0038] The preparation method of the metal thin film bridge igniter comprises the following steps:

[0039](1) Clean the polyimide substrate with a diameter of 100mm to 400mm and a thickness of 30μm to 200μm to remove oil and impurities from the substrate;

[0040] (2) Put the substrate into the fixture, put it on the planet carrier of the coating system, and deposit Ta with a thickness of 0.05 μm to 0.1 μm on the surface of the substrate by means of ion beam sputtering deposition (PVD). 2 o 5 Transition layer film;

[0041] (3) Deposited by ion beam sputtering on Ta 2 o 5 Deposit SiO with a thickness of 0.1 μm to 1 μm on the surface of the transition layer film 2 thermal insulation film;

[0042] (4) Then deposited on SiO by ion beam sputtering 2 A Ni-Cr alloy film with a thickness of 0.2 μm to 4 μm is prepared on the surface of the thermal isolation film;

[0043] (5) Prepare a photoresist mask layer in the shape of a film bridge on the surface of the Ni-Cr alloy film...

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Abstract

The invention discloses a metal film bridge igniter and a preparation method thereof, which are mainly applied to an automobile safety airbag and a safety device, and also can be popularized and applied to weapon systems and satellite as well as civil anti-collision airbags and explosion engineering. The igniter comprises a substrate with smaller heat conduction coefficient, a filter layer film and a heat isolation layer film, so that the ignition voltage of a nickel-chromium (Ni-Cr) alloy film igniter is less than 4V, the ignition energy is about 80 micro Joule, the ignition time is less than 50 micro-seconds, the working voltage of the igniter is effectively reduced, and the ignition time of the igniter is prolonged. Meanwhile, an igniter plug pin is connected with a film bridge electrode zone in a lead-free way through a through hole in the surface of the substrate, the ambient impact resistance of the igniter is improved, and the reliability of the igniter is greatly improved. By adopting the micro machining technology, the metal film bridge igniter has advantages of low cost, easy production and the like.

Description

technical field [0001] The invention belongs to the technical field of electrical explosive devices, and in particular relates to a metal film bridge igniter based on micromachining technology and a preparation method thereof. More specifically, the present invention relates to a kind of metal film bridge igniter and its preparation method, its resistance heating element is made up of a kind of metal film bridge structure, and by selecting the base sheet and transition layer film of lower thermal conductivity, reduce The ignition energy and working voltage of the igniter are improved, the ignition time of the igniter is improved, the electrical interconnection between the pole needle and the electrode area of ​​the igniter is realized through the through hole, and the reliability level of the igniter is enhanced. Background technique [0002] Usually, the bridge wire type electric pyrotechnic igniter is the ignition method that people have been commonly used. It is composed ...

Claims

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Application Information

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IPC IPC(8): F23Q13/00B32B33/00
Inventor 谢贵久景涛颜志红白庆星张建国
Owner 48TH RES INST OF CHINA ELECTRONICS TECH GROUP CORP
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