Hemispherical shell organic electroluminescence device and preparation method thereof
A hemispherical shell and electroluminescence technology, which is applied in the manufacture of semiconductor/solid-state devices, semiconductor devices, electric solid-state devices, etc. Transverse waveguide loss can not be taken into account and other problems, to achieve the effect of improved light extraction efficiency and simple preparation process
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[0038] The preparation method of the above-mentioned hemispherical shell-shaped organic electroluminescent device, such as figure 2 shown, including the following steps:
[0039] S1. The hemispherical substrate (eg, glass) is ultrasonically cleaned with purified water, acetone, ethanol, etc. for 15 minutes in sequence, and dried after cleaning;
[0040] S2. Using a magnetron sputtering process, the hemispherical shell-shaped base is placed in a vacuum chamber of a magnetron sputtering device, and an anode layer is sputtered on the inner surface of the hemispherical shell-shaped base to obtain a hemispherical shell-shaped anode base; Next, the glass coated with the anode layer is spin-coated with photoresist, exposed, developed, etched with aqua regia, and etched into the required pattern and size, and then the etched conductive glass is cleaned, followed by pure water, acetone, Ultrasonic cleaning with ethanol etc. for 15 minutes each, and after cleaning, perform oxygen plas...
Embodiment 1
[0046] The structure of the hemispherical shell-shaped organic electroluminescent device of the present embodiment is: glass / ITO / m-MTDATA:F4-TCNQ / TAPC / TCTA:Ir(ppy) 3 / Bphen / Bphen:Cs 2 CO 3 / Mg:Ag.
[0047] The preparation steps of the hemispherical shell-shaped organic electroluminescent device of this embodiment are as follows:
[0048] 1. Clean the hemispherical glass substrate with an inner diameter of 5mm and a thickness of 2mm with pure water, acetone, ethanol, etc. for 15 minutes, and then dry it;
[0049] 2. Put the hemispherical glass substrate into the organic vacuum chamber of the magnetron sputtering equipment, sputter a layer of 150nm thick ITO anode layer; then spin-coat the glass coated with the ITO anode layer with photoresist, expose and develop , Aqua regia etching, etch into the required pattern and size, then clean the etched conductive glass, and then use pure water, acetone, ethanol, etc. to ultrasonically clean each for 15 minutes, and then perform oxy...
Embodiment 2
[0054] The structure of the hemispherical shell-shaped organic electroluminescent device of the present embodiment is: glass / FTO / TPD:TCNQ / TPD / TCTA:Ir(ppy) 3 / PBD / PBD:LiF / Ag.
[0055] The preparation steps of the hemispherical shell-shaped organic electroluminescent device of this embodiment are as follows:
[0056] 1. The hemispherical glass substrate with an inner diameter of 5 mm and a thickness of 4 mm was ultrasonically cleaned with purified water, acetone, ethanol, etc. for 15 minutes, cleaned and dried;
[0057] 2. Put the hemispherical glass substrate into the organic vacuum chamber of the magnetron sputtering equipment, sputter a layer of FTO anode layer with a thickness of 180nm; then spin-coat the glass coated with the FTO anode layer with photoresist, expose and develop , Aqua regia etching, etch into the required pattern and size, then clean the etched conductive glass, and then use pure water, acetone, ethanol, etc. to ultrasonically clean each for 15 minutes, an...
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