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Method for preparing diamond-like carbon film on inner surface of metal

A diamond thin film and inner surface technology, which is applied in metal material coating process, gaseous chemical plating, coating, etc., can solve the problems that the transition layer technology is difficult to realize and cannot meet actual needs, and achieves short operation process and low equipment cost. simple effect

Active Publication Date: 2016-06-15
LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, for the inner wall of the device, such as the engine cylinder liner, oil storage tank, exhaust pipe, muffler, etc., where the diamond-like film may be used, the transition layer technology is difficult to achieve.
In the existing vapor deposition technology, such as plasma chemical vapor deposition, hot wire assisted chemical vapor deposition, direct current, radio frequency, direct current pulse enhanced plasma chemical vapor deposition and other technologies, the film adhesion force prepared on the inner wall of the pipeline or the inner wall of the plastic bottle is still not enough. Meet actual needs

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0016] Take a ductile iron right-angle elbow, and its surface diamond-like film is composed of intrinsic matrix / subsurface injection layer / surface injection layer / diamond-like film. The treatment process is carried out according to the following steps: 1) The ductile iron right-angle elbow is subjected to conventional degreasing cleaning, followed by ultrasonic cleaning in chloroform solution; (2) The ductile iron right-angle elbow is placed in a deposition system for argon plasma Sputter cleaning, argon pressure 10-20Pa, bias voltage 1000-1600V, frequency 200-2000Hz, 15-20min; (3) keep the argon flow constant, gradually increase the methane flow to the system pressure 35-50Pa, time 30 ~50min, bias voltage 1000~2000V, frequency 200~2000Hz; (4) keeping the conditions of (3) unchanged, shut down the system after deposition for 30~120 minutes, and obtain a composite diamond-like carbon film after cooling.

Embodiment 2

[0018] Take a stainless steel S-bent pipe, and its surface diamond-like film is composed of intrinsic matrix / subsurface injection layer / surface injection layer / diamond-like film. The treatment process is carried out according to the following steps: (1) the normal degreasing and cleaning of the ductile iron right-angle elbow, followed by ultrasonic cleaning in chloroform solution; (2) the ductile iron right-angle elbow is placed in the deposition system for argon plasma Body sputtering cleaning, argon gas pressure 10-20Pa, bias voltage 1000-1600V, frequency 200-2000Hz, 15-20min; (3) keep the argon flow constant, gradually increase the acetylene flow to the system pressure 35-50Pa, time 20-40min, bias voltage 1000-2000V, frequency 200-2000Hz; (4) keeping the conditions of (3) unchanged, shut down the system after deposition for 30-90 minutes, and obtain a composite diamond-like carbon film after cooling.

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PUM

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Abstract

The invention discloses a method of preparing diamond-like carbon film on an inner surface of metal. Specifically, the plasm chemistry gaseous phase sedimentation technology is used. The diamond-like thin film with high rigidity, low friction coefficient, good corrosion resistance and low adhesive force is prepared on the inner surface. According to the method of preparing diamond-like carbon film on the inner surface of the metal, the diamond-like thin film with high combining force can be sedimentated on the inner walls of a motor cylinder sleeve, an oil storage tank inner wall, an air discharging pipeline, a silencer and the like.

Description

technical field [0001] The invention relates to a method for preparing a diamond-like carbon film on the inner surface of a metal. Specifically, a diamond-like carbon film with high hardness, low friction coefficient, good corrosion resistance and low adhesion is conveniently prepared on the inner surface by using plasma chemical vapor deposition technology. method for diamond-like films. Background technique [0002] Diamond-like carbon films have excellent mechanical, optical, electrical, biological, medical, tribological and good corrosion resistance properties, especially in terms of environmental friendliness and energy saving, showing great application potential. So far, diamond-like carbon films have been used in knives, oil-free sewing machines, heart valves, magnetic disks, etc. These applications are to prepare diamond-like carbon films on the regular outer surface, and the adhesion can be improved by designing an adhesion layer on the surface by sputtering, elect...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C16/27C23C16/50
Inventor 张俊彦张斌强力杨涛郑愉
Owner LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI