Electrostatic capacitor based on nano-electrode and preparation method thereof

Abstract

The invention discloses an electrostatic condenser based on nano electrodes and a preparation method of the electrostatic condenser. The condenser comprises two groups of pore arrays which are inserted into each other in parallel, are not communicated with each other, are provided with openings towards different surfaces and are arranged in an anode aluminum oxide template, wherein carbon nano tubes electrically connected with conductive films covering the surfaces of the pore arrays are deposited in pores. The method comprises the following steps of: preparing a secondary aluminum oxide template in a secondary anode oxidation method, wherein one surface of the template is provided with a first pore array, and the back of the template is provided with gaps which are parallel to pores of the first pore array and formed in the circumference of an arc barrier layer formed by the pores of the first pore array; corroding the back of the secondary aluminum oxide template in an acidic copper chloride solution to obtain the anode aluminum oxide template on one surface of which the first pore array is arranged and on the back of which a second pore array is arranged; and depositing the carbon nano tubes in the pores of the first pore array and the second pore array by a chemical vapor deposition technology, and performing evaporation on the conductive films on the two surfaces of the anode aluminum oxide template, thus obtaining the target product. The electrostatic condenser can be widely applied to the field of energy storage and utilization.

Description

technical field [0001] The invention relates to an electrostatic capacitor and a preparation method thereof, in particular to an electrostatic capacitor based on nanometer electrodes and a preparation method thereof. Background technique [0002] An electrostatic capacitor is an energy storage device that stores charges on the surface of electrodes through electrostatic interaction. Generally, electrostatic capacitors only have a low energy storage density because only the electrode surface can store charges. With the emergence of nanomaterials and technologies, people use porous materials to achieve high specific surface area of ​​electrodes, which greatly improves the capacitance and energy storage density of electrostatic capacitors, such as Nanotubular metal insulator metal capacitor arrays for energy storage, Nature Nanotechnology , 2009, 4, 292. (Nanotubular metal-insulator-metal capacitor arrays for energy storage, Nature Nanotechnology, 2009, Vol. 4, p. 292). The c...

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Problems solved by technology

However, no matter it is the product or its preparation method, there are deficiencies. First, although the product has a very high electrode specific surface area, it is because the intermediate alumina is used as the dielectric layer, and the nitrogen inside and outside the dielectric layer TiO is composed of a pair of electrodes and a capacitor array located in the nanopores of the anodized aluminum template, so its external electrical connection is a difficult problem, which greatly increases the difficulty of practical application; secondly, atomic layer deposition technology is difficult Synthesizing tubular materials with uniform wall thickness in nanoscale holes, especially the synthesis of multilayer sleeved tubular materials with uniform wall thickness in nanoscale holes, cannot guarantee the consistency of product performance; finally, the use of atomic layer The high price of deposition technology equipment makes it difficult to reduce the production cost of the product, which is not conducive to the commercial application of the product

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