Manufacturing method of ultramicropore broadband flexible micro-perforated plate
A technology of micro-perforated plate and manufacturing method, which is applied in the field of vibration reduction and noise reduction, can solve the problems of not suitable, lack of flexibility of micro-perforated plate, small deformation, etc., and achieve the effect of high processing precision, compact structure and small volume
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[0016] Example 1 Using MEMS technology to process a single crystal silicon template with a cylindrical array diameter of 50um
[0017] (1) Use square glass with a side length of 10cm to make a lithography plate, and the distribution density of the opaque circular pattern on the lithography plate is 5×10 7 Pcs / m2;
[0018] (2) Choose a single-sided polished silicon wafer with a diameter of 4 inches and a crystal orientation of (100) with a thickness of 500 microns, and then chemically clean the single-crystal polished silicon wafer, and then dry it;
[0019] (3) A 600nm thick silicon dioxide film and a 300nm thick metal aluminum film are sequentially grown and deposited on the polished surface of the monocrystalline silicon wafer;
[0020] (4) Spin-coating a layer of photoresist with a thickness of 2 microns on the metal aluminum film;
[0021] (5) After the steps of exposure, development, fixing, hardening, etc., the cylindrical array pattern on the photoresist plate is transferred...
Example Embodiment
[0026] Example 2 Using the above cylindrical array template to make a flexible micro-perforated plate with an ultra-micro aperture of 50um
[0027] (1) Carry out chemical treatment to reduce the surface energy of the above-mentioned processed monocrystalline silicon cylindrical array template, clean and dry;
[0028] (2) The two-component polyether polyurethane, which is a flexible material with a certain viscosity and configured as a liquid, is deposited on the surface of the cylindrical array template by spin coating or casting; see figure 2 , The gaps of the cylindrical array are filled with flexible material two-component polyether polyurethane, and the flexible material 3 completely contains the cylindrical array 2;
[0029] (3) Place the above-mentioned template with flexible material 3 in an oven set at a temperature of 80 degrees Celsius for about 30 minutes to completely cure the two-component polyether polyurethane flexible material deposited on the surface of the cylindri...
Example Embodiment
[0032] Example 3 Using LIGA technology to process templates with a cylindrical array diameter of 100um
[0033] (1) Use Au as the absorber to make an X-ray lithography plate so that the distribution density of the opaque circular pattern on the lithography plate is 6×10 6 Pcs / square meter.
[0034] (2) Chemical cleaning of single-crystal polished silicon wafers and post-drying treatment; single-crystal silicon wafers can be single-sided polished or double-sided polished silicon wafers with any crystal orientation and any resistivity. The diameter can be 2 inches to 4 inches. In this example, a single-sided polished silicon wafer with a diameter of 4 inches and a crystal orientation of (100) is selected, and the thickness is 500 microns;
[0035] (3) On the polished surface of the single crystal silicon wafer, a layer of conductive material metal nickel film is grown and deposited by the radio frequency sputtering process, the thickness of which is 300 nanometers;
[0036] (4) Spi...
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