Novel crucible and manufacturing method thereof

A crucible, a new type of technology, applied in chemical instruments and methods, self-melting liquid pulling method, crystal growth and other directions, can solve the problems of high material cost, silicon vapor erosion, erosion strength loss, etc., to overcome thermal stress and resist erosion. , The effect of less material processing waste

Inactive Publication Date: 2013-12-25
SHANGHAI QI JIE CARBON MATERIALS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] 1. There is thermal stress and silicon vapor erosion, resulting in crucible cracking and erosion loss;
[0004] 2. It needs sintering or vapor deposition or liquid dep

Method used

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  • Novel crucible and manufacturing method thereof
  • Novel crucible and manufacturing method thereof
  • Novel crucible and manufacturing method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0053] Please refer to Figure 6 , this embodiment is a flow chart for manufacturing a crucible using a sheet-like carbon-carbon composite material as a raw material. The thickness range of the sheet-like carbon-carbon composite material is 5-50mm, and the density is: 1.3-1.85g / cm3. It can be seen that it mainly includes The following steps include:

[0054] S201: Perform structural design on the structure of the crucible;

[0055] According to the actual thermal design requirements, the crucible structure can be flexibly designed without the need to make an embryo body, which can effectively save costs and shorten the delivery time, and can be mass-produced at the same time.

[0056] S202: Decompose the drawing into several parts according to the structural design;

[0057] The structure of the crucible is decomposed into an upper ring part 10 , a middle ring part 20 and a lower bowl part 30 .

[0058] S203: Design each component;

[0059] Design the combined piece of the...

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PUM

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Abstract

The invention provides a novel crucible, which is applied in a manufacturing process of monocrystalline silicon or polysilicon. The novel crucible comprises an upper ring part, a middle ring part and a lower bowl mounting part, which are connected in sequence, wherein the upper ring part is an annular hollow body and is formed in such a manner that a plurality of first arc-shaped combination pieces are arranged and stacked in parallel to the circumferential direction of the bottom part and are assembled through pins vertical to the bottom parts, the side face of the upper ring part is provided with a gap parallel to the axial direction, and a connecting mechanism is arranged on the gap; the middle ring part is an annular hollow body and is formed in such a manner that a plurality of second arc-shaped combination pieces are arranged and stacked in parallel to the circumferential direction of the bottom part and are assembled through pins vertical to the bottom parts, the side face of the middle ring part is provided with a gap parallel to the axial direction, and a connecting mechanism is arranged on the gap; the lower bowl mounting part is an arc-shaped bowl body and comprises a plurality of third combination pieces and a bowl bottom, and the third combination pieces are vertically connected with the bowl bottom to form a bowl wall. The crucible provided by the invention is high in cost performance, strong in corrosion resistance, capable of effectively resisting against erosion of silicon vapor and long in service life.

Description

technical field [0001] The invention relates to the application of a carbon fiber composite material in the manufacturing process of monocrystalline silicon or polycrystalline silicon, in particular to a new crucible made of carbon fiber composite material and a processing and manufacturing method of the new crucible. Background technique [0002] In the production of single crystal silicon, the Czochralski method (CZ method) is commonly used at present, which is a method of pulling a single crystal from a melt along the vertical direction. In prior art devices, there is a component that is a graphite crucible, which is used to carry the inner quartz crucible. During use, due to the different expansion coefficients of the quartz crucible and the graphite crucible, and the corrosion reaction between silicon vapor and graphite, there are problems such as cracking of the graphite crucible and loss of strength due to erosion. Moreover, as the diameter of the crystal grown by mo...

Claims

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Application Information

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IPC IPC(8): C30B15/10C30B29/06
Inventor 申富强
Owner SHANGHAI QI JIE CARBON MATERIALS
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