Semi-conductor laser device capable of outputting double-wavelength laser for optical mixing to generate THz waves and manufacturing method

Abstract

The invention relates to a semi-conductor laser device capable of outputting double-wavelength laser for optical mixing to generate THz waves and a manufacturing method. The semi-conductor laser device comprises a semi-conductor laser device epitaxy structure formed by a substrate, a lower limiting layer I, a lower waveguide layer I, an active layer I, an upper waveguide layer I, an upper limiting layer I, a regenerating mechanism, a lower limiting layer II, a lower waveguide layer II, an active layer II, an upper waveguide layer II, current blocking layers, an upper limiting layer II and a P-type Ohm contact layer. The two current blocking layers are formed on the two sides of the longitudinal shaft of the semi-conductor laser device respectively in a wet oxidation method or a proton bombard method, and the current spreading effect of the active area II is effectively prohibited. The THz waves generated by optical mixing achieved through the double-length laser are easy to produce and achieve, light output through optical cavity coupling is coaxial, and synchronous control is achieved. The coaxial double-wavelength semi-conductor laser device enables a THz source to be simple in structure, cost is reduced, continuous output power is large, and the THz source can work at the room temperature.

Description

technical field [0001] The invention relates to a semiconductor laser and a manufacturing method, belonging to the technical field of semiconductor optoelectronics, in particular to a semiconductor laser and a manufacturing method for dual-wavelength output light mixing to generate terahertz waves. Background technique [0002] Terahertz (THz, 1THz=1012Hz) usually refers to a fairly wide range of electromagnetic radiation between millimeter waves and infrared light with a frequency from 0.1THz to 10THz, and is in the transition stage from macroelectronics to microphotonics. Terahertz rays exist widely in nature. For example, the thermal radiation of most surrounding objects has terahertz radiation, and most of the cosmic background radiation spectrum is in the terahertz frequency band. In recent years, due to the broad application prospects of the special band of THz waves in environmental monitoring, biological and medical engineering, astronomy, material science engineerin...

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Problems solved by technology

Using two independent semiconductor lasers to achieve photon mixing can obtain continuous THz radiation, but combining discrete las...

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