Rapid bonding method for micro-fluidic chip
A microfluidic chip and bonding technology, applied in the field of micromachining, can solve the problem of low bonding efficiency
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Embodiment 1
[0024] figure 1 It is a schematic diagram of a microfluidic chip bonding process based on double-sided adhesive and ball hook structure. The specific process is as follows: (1) Align the ball hook structure D on the two substrates A and C, and the pressure-sensitive double-sided adhesive B is located in the middle of the two substrates; (2) Align the ball hook structure D on the upper substrate A The hooks are pressed together with the complementary structure of the hooks on the lower substrate to form a whole, thereby preparing a closed microchannel E and completing the bonding of the microfluidic chip. The best bonding strength can be obtained by keeping the chip at room temperature in the dark for 3-10 hours. The method of this embodiment is particularly suitable for the bonding preparation of large-scale microfluidic chips.
Embodiment 2
[0025] Example 2 A microfluidic chip bonding method based on photoresist and ring-shaped hook structure
[0026] figure 2 It is a schematic diagram of the bonding process of a microfluidic chip based on a photoresist and a ring-shaped hook structure. The specific process is as follows: (1) Align the ring-shaped hook structures D' on the two substrates A' and C', wherein the photoresist film B' is coated on the surface of the lower substrate by a spin coating process; (2 ) Compress the ring-shaped hooks on the upper substrate A' with the complementary structure of the hooks on the lower substrate to form an integrated body, thereby preparing a closed microchannel E' and completing the bonding of the microfluidic chip. The chip is irradiated with ultraviolet light for a certain period of time to realize the curing and polymerization of the photoresist and obtain the best bonding strength.
Embodiment 3
[0027] Example 3 A microfluidic chip bonding method based on double-sided adhesive and an external cantilever hook module
[0028] image 3 It is a schematic diagram of a microfluidic chip bonding process based on double-sided adhesive and ball hook structure. The specific process is as follows: (1) align the two substrates a, c and the double-sided adhesive film b according to the hook insertion hole d, and the double-sided adhesive film is located in the middle of the two substrates; (2) use the double-sided adhesive film b Paste the graphics to paste the two substrates together to form a closed microfluidic channel e; (3) insert the cantilever hook module f into the two substrates through the hook insertion hole d to complete the bonding of the microfluidic chip. The best bonding strength can be obtained by keeping the chip at room temperature in the dark for 3-10 hours.
[0029] Using the fast bonding method of the microfluidic chip provided by the present invention, it ...
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