Cell with anti-PID effect and preparation method thereof
A cell and effect technology, applied in circuits, electrical components, final product manufacturing, etc., can solve the problems of little anti-PID effect, low cost input and practicability, thermal damage to the surface of silicon wafers, etc., and achieve process stability. Good reproducibility and repeatability, delay PID effect, reduce the effect of compound center
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Embodiment 1
[0024] Embodiment 1: An anti-PID effect cell, comprising a crystalline silicon substrate after etching and cleaning, an anti-PID protective layer and a passivation anti-reflection layer sequentially deposited thereon. Among them, the anti-PID protective layer is a silicon-oxygen bonded Si-O thin layer, such as figure 1 As shown, Si-bonds an oxygen atom O provided by ozone on the dangling bond of Si on the surface of the crystalline silicon substrate to form a Si-O bond, and the thickness of the Si-O thin layer is 0.6 nm. The passivating antireflection layer is deposited by a tubular coating deposition process.
[0025] The manufacturing process of the above-mentioned anti-PID effect battery sheet comprises the following steps:
[0026] (1) Etching and cleaning the crystalline silicon substrate;
[0027] (2) Pretreatment: feed nitrogen for 50s, nitrogen flow rate is 8slm;
[0028] (3) Depositing an anti-PID protective layer: at a low temperature environment of 25°C, the pret...
Embodiment 2
[0034] Embodiment 2: roughly the same as Embodiment 1, the difference is that in the manufacturing process of the battery sheet: step (2) pretreatment, nitrogen gas is introduced for 80 s, and the nitrogen flow rate is 10 slm; step (3) low-temperature environment for depositing an anti-PID protective layer At 0°C, the pretreated crystalline silicon substrate is placed in an ozone environment with a concentration of 0.3% and a pressure of 1.5 standard atmospheric pressure, and the surface is strongly oxidized to form a silicon-oxygen bonded Si-O thin layer , reaction time 30s; step (4) deposition of passivation anti-reflection layer: ammonia gas flow rate: 2slm, silane flow rate: 200sccm, radio frequency power 4000W, deposition time 50s.
Embodiment 3
[0035] Embodiment 3: roughly the same as Embodiment 1, the difference is that in the manufacturing process of the battery sheet: step (2) pretreatment, nitrogen gas is passed through for 100s, and the flow rate of nitrogen gas is 7slm; step (3) low-temperature environment for depositing an anti-PID protective layer At 50°C, the pretreated crystalline silicon substrate is placed in an ozone environment with a concentration of 1.5% and a pressure of 1 standard atmosphere, and the surface is strongly oxidized to form a silicon-oxygen bonded Si-O thin layer , reaction time 1s; step (4) deposition of passivation anti-reflection layer: ammonia gas flow rate: 9slm, silane flow rate: 1900sccm, radio frequency power 7500W, deposition time 1000s.
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