Multi-arc ion plated hard coating prepared by adopting frequency-modulation electromagnetic coil, and method

A multi-arc ion plating and electromagnetic coil technology, applied in the direction of ion implantation plating, coating, metal material coating process, etc. The effect of high bond strength

Active Publication Date: 2014-07-30
ANHUI DUOJINTUCENG TECH CO LTD
View PDF6 Cites 11 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In general, although there are many studies on coating deposition process parameters, there are no reports about the influence of electromagnetic coil frequency on coating performance in the field of multi-arc ion plating technology.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Multi-arc ion plated hard coating prepared by adopting frequency-modulation electromagnetic coil, and method
  • Multi-arc ion plated hard coating prepared by adopting frequency-modulation electromagnetic coil, and method
  • Multi-arc ion plated hard coating prepared by adopting frequency-modulation electromagnetic coil, and method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0032] The cemented carbide samples are finely ground with 800-1200# metallographic sandpaper to make the surface roughness of the substrate Ra≤0.05μm, and then the surface of the substrate after fine grinding is polished to a mirror surface, cleaned with acetone and alcohol in turn, and then blown with an air gun. After drying, put it on the substrate frame of the circular turntable, then push the circular turntable carrying the substrate frame into the deposition chamber, close the furnace door tightly, install the electromagnetic coil on the wall of the deposition chamber, and the cathode target source on the wall of the deposition chamber, the electromagnetic coil and There is only one layer of furnace wall between the cathode and target sources. Use a mechanical pump and a molecular pump to pump the background vacuum of the vacuum chamber to 3-5×10 -3 Pa, enter Ar gas, increase the pressure to 1Pa, apply a high bias voltage of -900V, and glow clean for 2 to 25 minutes; af...

Embodiment 2

[0034] The cemented carbide samples are finely ground with 800-1200# metallographic sandpaper to make the surface roughness of the substrate Ra≤0.05μm, and then the surface of the substrate after fine grinding is polished to a mirror surface, cleaned with acetone and alcohol in turn, and then blown with an air gun. After drying, put it on the substrate frame of the circular turntable, then push the circular turntable carrying the substrate frame into the deposition chamber, close the furnace door, install the electromagnetic coil on the wall of the deposition chamber, and the cathode target source on the wall of the deposition chamber. There is only one layer of furnace wall between the coil and the cathode source. Use a mechanical pump and a molecular pump to pump the background vacuum of the vacuum chamber to 3-5×10 -3 Pa, enter Ar gas, increase the pressure to 1Pa, apply a high bias voltage of -900V, and glow clean for 2 to 25 minutes; after cleaning, adjust the vacuum to 3...

Embodiment 3

[0036] The cemented carbide samples are finely ground with 800-1200# metallographic sandpaper to make the surface roughness of the substrate Ra≤0.05μm, and then the surface of the substrate after fine grinding is polished to a mirror surface, cleaned with acetone and alcohol in turn, and then blown with an air gun. After drying, put it on the substrate frame of the circular turntable, then push the circular turntable carrying the substrate frame into the deposition chamber, close the furnace door, install the electromagnetic coil on the wall of the deposition chamber, and the cathode target source on the wall of the deposition chamber. There is only one layer of furnace wall between the coil and the cathode source. Use a mechanical pump and a molecular pump to pump the background vacuum of the vacuum chamber to 3-5×10 -3 Pa, enter Ar gas, increase the pressure to 1Pa, apply a high bias voltage of -900V, and glow clean for 2 to 25 minutes; after cleaning, adjust the vacuum to 3...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

PropertyMeasurementUnit
surface roughnessaaaaaaaaaa
thicknessaaaaaaaaaa
thicknessaaaaaaaaaa
Login to view more

Abstract

The invention discloses a multi-arc ion plated hard coating prepared by adopting a frequency-modulation electromagnetic coil, and a method. The method comprises the following steps: washing and putting a hard alloy matrix in a deposition chamber; leading into Ar gas, applying negative bias pressure onto the matrix for performing glow washing; and regulating the frequency of the electromagnetic coil to be 1-35Hz, starting a metal Cr target to obtain a Cr interfacial bonding layer, depositing a CrN transition layer, and opening a Cr metal target and an AlCr alloy target to prepare AlCrN working layer. By additionally arranging the electromagnetic coil with adjustable frequency in the deposition process, the hard coating with high hardness, high bonding strength and high wear resistance can be obtained, the multi-arc ion plated hard coating depositing technology is improved, the research content of multi-arc ion plating technology in practical industrial production can be enriched, a hard coating deposition tool is applicable to processing a high-hardness steel material under high-speed cutting condition, and the industrial application range of the multi-arc ion plated hard coating can be extended.

Description

technical field [0001] The invention relates to a method for preparing a surface coating of a high-speed cutting tool and a precision mold, in particular to a method for preparing a multi-arc ion plating hard coating by using a frequency-modulated electromagnetic coil. Background technique [0002] Protective polycrystalline transition metal nitride hard coatings are widely used to improve high-speed cutting tools and precision molds such as stamping dies, cold forging, etc. due to their high hardness, high wear resistance, excellent high temperature oxidation resistance and corrosion resistance Mechanical properties and service life of molds, etc. Compared with other binary transition metal nitride coatings such as Ti-N series, Cr-N-based coatings have higher hardness, better bonding strength, and more excellent high temperature Oxidation and corrosion resistance. The CrN coating introduces other alloying elements to form a ternary coating Al-Cr-N system and a quaternary c...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/32C23C14/06
Inventor 张世宏陈忠方炜王启民
Owner ANHUI DUOJINTUCENG TECH CO LTD
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap