Composition and preparation method of high-activity defluorinating agent for nitrogen trifluoride anhydrous decomposition reaction

A technology of decomposition reaction and nitrogen trifluoride, which is applied in separation methods, chemical instruments and methods, and separation of dispersed particles, can solve problems such as high energy consumption, complicated operation process, and strong corrosion of reactors, and achieve high reactivity, The effect of preparation process parameter control and simple preparation process

Inactive Publication Date: 2014-08-06
YANTAI UNIV
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  • Abstract
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  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Among them, the high-temperature calcination method requires the calcination temperature to reach above 1000°C to obtain a high decomposition rate of nitrogen trifluoride, and the energy consumption is very high.
The catalytic hydrolysis method to decompose nitrogen trifluoride exhaust gas is to react nitrogen trifluoride and water under the action of a catalyst to generate nitrogen monoxide, nitrogen dioxide and hydrogen fluoride gas [Takubo et al. Catal.Commun., 2009, 11, 147-150 ; Jeon et al., Chem.Commun., 2003,1244-1245], hydrogen fluoride gas meets water and generates hydrofluoric acid, which has a strong corrosive effect on the reactor, and the operation process is complicated

Method used

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  • Composition and preparation method of high-activity defluorinating agent for nitrogen trifluoride anhydrous decomposition reaction
  • Composition and preparation method of high-activity defluorinating agent for nitrogen trifluoride anhydrous decomposition reaction
  • Composition and preparation method of high-activity defluorinating agent for nitrogen trifluoride anhydrous decomposition reaction

Examples

Experimental program
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Effect test

Embodiment 1

[0034] Taking by weighing 0.651 gram of mass concentration is 50% manganese nitrate (molecular formula is Mn(NO 3 ) 2 , the molecular formula of manganese nitrate in the following examples is the same) solution, diluted with water to 8.5 ml, impregnated with 5 grams of alumina particles for 24 hours, dried at 100°C for 6 hours, and roasted at 600°C for 3 hours to obtain manganese oxide-alumina Fluorine agent (among them, the mass percentage of manganese and alumina is 2%), used for NF 3 Anhydrous decomposition reaction, NF 3 See the appendix for the decomposition percentage data figure 1 .

[0035] NF 3 Decomposition reaction conditions: take the defluorination agent and put it into the reaction tube, put it into the reaction furnace, and feed the reaction gas 2%NF 3 / 98%He (NF 3 The volume concentration is 2%), and the gas space velocity is 1.5 liters / hour / gram (defluorination agent). Electric heating to 400 ℃, constant temperature reaction. Testing NF with Gas Chroma...

Embodiment 2

[0037] Weigh 1.301 g of manganese nitrate solution with a mass concentration of 50%, add water to dilute to 8.5 ml, impregnate 5 g of alumina particles for 24 hours, dry at 100°C for 6 hours, and roast at 600°C for 3 hours to obtain manganese oxide-alumina defluorination agent (among them, the mass percentage of manganese and alumina is 4%) for NF 3 Anhydrous decomposition reaction, NF 3 See the appendix for the decomposition percentage data figure 2 .

Embodiment 3

[0039] Weigh 1.626 g of manganese nitrate solution with a mass concentration of 50%, add water to dilute to 8.5 ml, impregnate 5 g of alumina particles for 24 hours, dry at 100°C for 6 hours, and roast at 500°C for 3 hours to obtain manganese oxide-alumina defluorination agent (among them, the mass percentage of manganese and alumina is 5%), used for NF 3 Anhydrous decomposition reaction, NF 3 See the appendix for the decomposition percentage data image 3 .

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Abstract

The invention relates to composition and a preparation method of a high-activity defluorinating agent for a nitrogen trifluoride anhydrous decomposition reaction. The composition and the preparation method are characterized in that the defluorinating agent consists of aluminum oxide coated with manganese oxide and adopts a core-shell structure, the aluminum oxide is the core (matrix), and the manganese oxide is the shell (auxiliary); aluminum oxide particles are impregnated in a manganese nitrate or manganese acetate solution with an incipient wetness method and then calcined to prepare the defluorinating agent, wherein the mass percent of manganese to aluminum oxide is 2-10%. The prepared defluorinating agent has the outstanding characteristics as follows: raw materials are cheap and easy to obtain, the preparation process is simple, and preparation process parameters are easy to control. The defluorinating agent is used for decomposing nitrogen trifluoride exhaust gas emitted in the electronic industrial process and is high in reactivity and wide in application range.

Description

technical field [0001] The invention relates to the composition and preparation method of a highly active defluorinating agent used for the anhydrous decomposition reaction of nitrogen trifluoride. Background technique [0002] Human-made emissions of greenhouse gases lead to global warming, which has aroused widespread concern. Nitrogen trifluoride is an important greenhouse gas with a greenhouse effect potential of CO 2 17,200 times of that, and the retention time is about 740 years. Nitrogen trifluoride is a plasma etching gas and cleaning gas used in the electronics industry. If the used nitrogen trifluoride waste gas is discharged directly into the atmosphere without treatment, it will cause serious harm to the ecological environment. [0003] Existing treatment methods for nitrogen trifluoride waste gas include high-temperature calcination, catalytic hydrolysis, and anhydrous decomposition. Among them, the high-temperature calcination method requires the calcination...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B01D53/68B01D53/86
Inventor 徐秀峰潘燕飞殷春晓
Owner YANTAI UNIV
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