LED epitaxial wafer growing on Cu substrate and preparing method and application of LED epitaxial wafer

Abstract

The invention discloses an LED epitaxial wafer growing on a Cu substrate. The LED epitaxial wafer growing on the Cu substrate comprises the Cu substrate, an AlN buffer layer, a U-GaN film layer, an N-GaN film layer, an InGaN/GaN multi-quantum-well layer and a P-GaN film. The AlN buffer layer, the U-GaN film layer, the N-GaN film layer, the InGaN/GaN multi-quantum-well layer and the P-GaN film sequentially grow on the Cu substrate. By the adoption of the low-temperature growth technology, a GaN film grows on the novel metal Cu substrate in an epitaxial mode, so that the LED epitaxial wafer with the high quality is obtained; by the adoption of the metal Cu substrate, the growth technology is simple, the price is low, and the manufacturing cost of a device can be reduced to a great extent; by the selection of the proper crystal orientation, the GaN epitaxial film with the high quality is obtained from the Cu substrate (111) and the efficiency of nitride devices such as a photoelectric detector can be improved to a great extent.

Description

technical field [0001] The invention relates to an LED epitaxial wafer, in particular to an LED epitaxial wafer grown on a Cu substrate, a preparation method and application thereof. Background technique [0002] Light-emitting diode (LED), as a new type of solid-state lighting source and green light source, has outstanding features such as small size, low power consumption, environmental protection, long service life, high brightness, low heat and colorful, and is widely used in outdoor lighting, commercial lighting and decoration Engineering and other fields have a wide range of applications. At present, under the background of the increasingly serious problem of global warming, saving energy and reducing greenhouse gas emissions has become an important issue faced by the whole world. A low-carbon economy based on low energy consumption, low pollution, and low emissions will become an important direction of economic development. In the field of lighting, the application ...

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Problems solved by technology

[0006] However, the metal Cu substrate is chemically unstable. When the epitaxial temperature is higher than 620°C, the interface reaction between the epitaxial nitride and the metal substrate will seriously affect the quality of the epitaxial film growth.

Pioneering researcher and well-known scientist Akasaki et al. have tried to apply traditional MOCVD or MBE technology to directly epitaxially grow nitrides on substrate materials with variable chemical properties. difficulty

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