Neodymium iron boron magnetic material with composite coating layer and preparation method for neodymium iron boron magnetic material
A technology of magnetic materials and composite coatings, applied in coatings, chemical instruments and methods, metal material coating processes, etc., can solve problems such as aluminum nitride and silicon carbide composite coatings that have not been seen, and reduce internal stress. , prolong the service life, the effect of strong bonding force of the membrane base
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[0022] Example 1
[0023] Preparation of NdFeB magnetic material surface with aluminum nitride and silicon carbide composite coating:
[0024] (1) Grind the surface of the NdFeB magnetic material with 400 mesh, 500 mesh, 600 mesh, and 800 mesh sandpaper in order from coarse to fine; then perform mechanical polishing. Mechanical polishing refers to the grinding of The material uses diamond grinding paste to perform mirror-brightening treatment on the rotating polishing disc with flannel; finally, the surface is cleaned, and the cleaning conditions are: ultrasonic cleaning with acetone and alcohol for 20 minutes.
[0025] (2) Vacuum aluminum nitride plating: Put the prepared magnet and target into the chamber, and vacuum the coating chamber through the mechanical pump and molecular pump. When the background vacuum of the vacuum chamber reaches 2.0×10 -4 At Pa, pass Ar (flow rate 20sccm) as sputtering gas, pressure 0.5Pa, power 100W, 15min after pre-sputtering, pass N 2 (Flow rate 10scc...
Example Embodiment
[0028] Example 2
[0029] (1) Grind the surface of the NdFeB magnetic material with 400 mesh, 500 mesh, 600 mesh, and 800 mesh sandpaper in order from coarse to fine; then perform mechanical polishing, which refers to the grinding of The material uses diamond abrasive paste to perform mirror-brightening treatment on a rotating polishing disk with flannel; finally, the surface is cleaned, and the cleaning conditions are: ultrasonic cleaning with acetone and alcohol for 10 minutes.
[0030] (2) Vacuum aluminum nitride plating: Put the prepared magnet and target into the chamber, and vacuum the coating chamber through the mechanical pump and molecular pump. When the background vacuum of the vacuum chamber reaches 2.0×10 -4 At Pa, pass Ar (flow rate 20sccm) as sputtering gas, pressure 0.5Pa, power 100W, 15min after pre-sputtering, pass N 2 (Flow rate 10sccm) As the reaction gas, the magnet is plated with aluminum nitride for 1 hour, and the aluminum nitride-plated neodymium iron boron m...
Example Embodiment
[0033] Example 3
[0034] The preparation method of this example is the same as Example 1 and Example 2. The thickness of the vacuum-plated aluminum nitride film on the surface of the prepared neodymium iron boron magnetic material is 100 nm, and the thickness of the silicon carbide film is 400 nm.
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