Method for detecting biomolecules by using porous-silicon micro-cavity biosensor and based on reflected light intensity
A technology of biomolecules and porous silicon, which is applied in the measurement of phase influence characteristics, etc., can solve the problems of expensive precision and achieve the effect of low price and simple preparation process
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Embodiment 1
[0038] (1) Prepare porous silicon by electrochemical etching method: use P-type single-sided polished single-crystal silicon wafer, its resistivity is 4Ω-m, and the thickness is 100μm. Silicon wafers were ultrasonically washed with acetone, absolute ethanol, and deionized water for 15 minutes before the experiment. Perform electrochemical etching on the cleaned single crystal silicon wafer. The corrosion solution is composed of 49% hydrofluoric acid and 95% ethanol according to the volume ratio HF:CH 3 CH 2 OH=1:1 ratio mixed. The corrosion process is controlled by a current density of 200mA / cm 2 and 800mA / cm 2 The constant current source boot. First use a current density of 200mA / cm 2 , the corrosion time is 10s, the pause is 5s, and the current density is 800mA / cm 2 , the corrosion time is 10s, and then pause for 5s, so as to alternately corrode for 2 cycles. 800mA / cm for the middle microcavity 2 Pause for 10s in the middle of corrosion for 30s, and finally use a c...
Embodiment 2
[0051] The corrosion process is controlled by a current density of 300mA / cm 2 and 600mA / cm 2 The constant current source boot. Others are the same as in Embodiment 1, and the sensitivity of porous silicon is 8800±50 nm / refractive index unit.
Embodiment 3
[0053] The organic solvent in step (2) is THF, and the others are the same as in Example 1. The sensitivity of the obtained porous silicon reaches 8850±50nm / refractive index unit.
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