Organic monocrystal field effect circuit and preparation method thereof

A field effect and circuit technology, which is applied in the field of organic single crystal field effect circuits and its preparation, can solve the problems of device performance degradation, easy to generate defects, and limit the size of crystals, and achieve high integration and high precision.

Active Publication Date: 2014-10-22
NORTHEAST NORMAL UNIVERSITY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

But there are also some shortcomings: on the one hand, the structure of the bottom contact organic single crystal field effect circuit reported so far is as follows: figure 1 As shown, the electrode protrudes from the surface of the insulating layer. This structure is more suitable for larger-sized crystals, which limits the size of the crystals used.
Because when the organic micro/nano semiconductor is transferred to this structure electrode, such as figure 2 As shown in the figure, due to the protruding structure of the elec

Method used

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  • Organic monocrystal field effect circuit and preparation method thereof
  • Organic monocrystal field effect circuit and preparation method thereof
  • Organic monocrystal field effect circuit and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0049] Example 1. Preparation of Copper Phthalocyanine Organic Single Crystal Field Effect Circuit

[0050] 1. Preparation of circuit mask

[0051] (1) Use L-editor software to design the circuit mask pattern of source electrode, drain electrode, gate electrode and external electrode respectively; each layer should design the same alignment pattern, so as to align various electrode layers next.

[0052] (2) The circuit mask used in this embodiment was purchased from Nanjing Qingwei Electronics Technology Co., Ltd. The specific process is: spin-coat polymethyl methacrylate on quartz, and use laser direct writing method to etch step 1) to obtain The pattern of the circuit mask plate; then evaporate chromium (100nm), and remove the polymethyl methacrylate to obtain the circuit mask plate of the source electrode, the drain electrode, the gate and the external electrode.

[0053] 2. Preparation of flexible planar embedded laminated electrodes with inverter patterns

[0054] (1) U...

Embodiment 2

[0071] Example 2, preparation of rubrene organic single crystal field effect circuit (the aspect ratio of the driver device and load device of the designed rubrene single crystal field effect inverter is 1 / 5)

[0072] 1. Preparation of circuit mask

[0073] (1) Use L-editor software to design the circuit mask pattern of source electrode, drain electrode, gate electrode and external electrode respectively; each layer should design the same alignment pattern, so as to align various electrode layers next.

[0074] (2) The circuit mask plate used in this embodiment was purchased from Nanjing Qingwei Electronics Technology Co., Ltd. The specific process is: spin-coat polymethyl methacrylate on the glass, and use the laser direct writing method to etch step 1) to obtain The pattern of the circuit mask plate; then evaporate chromium, and remove the polymethyl methacrylate to obtain the circuit mask plate of the source electrode, the drain electrode, the gate electrode and the externa...

Embodiment 3

[0091] Example 3, preparation of rubrene organic single crystal field effect circuit (the aspect ratio of the driver device and load device of the designed rubrene single crystal field effect inverter is 2 / 5)

[0092] 1. Preparation of circuit mask

[0093] (1) Use L-editor software to design the circuit mask pattern of source electrode, drain electrode, gate electrode and external electrode respectively; each layer should design the same alignment pattern, so as to align various electrode layers next.

[0094] (2) The circuit mask used in this embodiment was purchased from Nanjing Qingwei Electronics Technology Co., Ltd. The specific process is: spin-coat polymethyl methacrylate on quartz, and use laser direct writing method to etch step 1) to obtain The pattern of the circuit mask plate; then evaporate chromium, and remove the polymethyl methacrylate to obtain the circuit mask plate of the source electrode, the drain electrode, the gate electrode and the external electrode. ...

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Abstract

The invention discloses an organic monocrystal field effect circuit and a preparation method thereof. The preparation method comprises the following steps of: preparing a circuit mask plate; preparing a flexible plane internally-embedded laminated electrode with a circuit pattern, including, 1) connecting octadecyl trichlorosilane on a surface of a substrate, 2) preparing a source electrode, a drain electrode and a grid electrode on the modified substrate respectively, and connecting with mercaptopropyl trimethoxy silane, 3) spin-coating polydimethylsiloxane on the metal electrode surfaces of the source electrode, the drain electrode and the grid electrode, 4) transferring the grid electrode on which the polydimethylsiloxane is spin-coated, performing oxygen plasma processing on the metal electrode surface of the grid electrode, and the polydimethylsiloxane surfaces of both the source electrode and the drain electrode respectively to form oxhydryl, and 5) shearing the source electrode and the drain electrode, and connecting the grid electrode, the source electrode and the drain electrode to form an integral body so as to obtain the flexible plane internally-embedded laminated electrode; preparing the organic monocrystal field effect circuit. As a high-precision photo-etching technology is adopted to prepare the electrodes in the invention, high-precision and complex patterns can be prepared, and the preparation method is convenient and practical.

Description

technical field [0001] The invention relates to an organic single crystal field effect circuit and a preparation method thereof, belonging to the field of organic electronics. Background technique [0002] After the rapid development of inorganic integrated circuits, the first real organic circuit did not appear until 1995. Philips Laboratories used pentacene and polyvinylthiophene to realize a series of basic circuit units such as inverters (Science1995 ,270,972), thus setting off a new chapter in the study of organic field effect circuits. Compared with inorganic materials, organic materials have many inherent advantages such as simple film-forming process, wide range of material sources, good compatibility with flexible substrates, and easy modulation of electrical properties (Nature, 2001, 414, 599; Chemical Reviews 2012, 112, 2208; Nature 2013 , 499, 458; Journal of the American Chemical Society 2004, 126, 8138). Therefore, the research on organic field effect transis...

Claims

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Application Information

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IPC IPC(8): H01L51/40
CPCH10K71/60H10K10/82H10K19/10H10K71/162H10K71/621H10K85/622H10K77/111H10K10/481H10K10/466H10K10/84H10K85/40H10K10/484H10K85/311
Inventor 童艳红汤庆鑫赵晓丽
Owner NORTHEAST NORMAL UNIVERSITY
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