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Method for improving bonding property of magnetron sputtering TiN coating on biomedical magnesium alloy surface

A biomedical and magnetron sputtering technology, which is applied in the direction of metal material coating process, coating, sputtering plating, etc., can solve the problems of unsatisfactory bonding performance, insufficient continuity and integrity of surface coating, etc. Achieve the effect of reducing friction coefficient, improving bonding performance and simple operation process

Active Publication Date: 2014-12-17
NANJING INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the biggest problem of using magnetron sputtering technology to deposit coatings on the surface of magnesium alloys is that the bonding properties cannot meet the requirements, and the continuity and integrity of the surface coatings are not enough, so further exploration and research are needed.

Method used

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  • Method for improving bonding property of magnetron sputtering TiN coating on biomedical magnesium alloy surface
  • Method for improving bonding property of magnetron sputtering TiN coating on biomedical magnesium alloy surface
  • Method for improving bonding property of magnetron sputtering TiN coating on biomedical magnesium alloy surface

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0025] (1) Surface pretreatment of biomedical magnesium alloys

[0026] Grind the Mg-1.87Nd-0.36Sr-0.31Zr biomedical magnesium alloy on the pre-grinding machine successively with water sandpaper of models 400#, 600#, 800#, 1000# until there are no obvious scratches on the surface of the magnesium alloy; Then the ground sample was polished on a polishing machine with a diamond polishing agent; the polished sample was placed in acetone and ethanol in turn for ultrasonic cleaning for 20 minutes, and finally dried with nitrogen for use.

[0027] (2) Installation of magnesium alloy substrate

[0028] Install the surface-pretreated magnesium alloy substrate on the tray that comes with the magnetron sputtering equipment, and fix it on the side with pins, which can not only prevent falling off, but also facilitate the complete coating of the entire surface of the substrate.

[0029] (3) Gradient bias Ti transition layer

[0030] Put the tray with the magnesium alloy substrate into t...

Embodiment 2

[0035] The operation methods of step (1) and step (2) are as shown in Example 1.

[0036] (3) Gradient bias Ti transition layer

[0037] Put the tray with the magnesium alloy substrate into the sputtering chamber, and the target material used for sputtering is metal Ti (diameter 80mm, thickness 5mm) with a purity of 99.8%. The Ti transition layer was deposited by a DC gradient bias method, that is, the gradient bias voltage was 0V / -10V / -30V / -50V, each bias condition was deposited for 2.5 minutes, and the total deposition time of the transition layer was 10 minutes. The distance between the target and the substrate during deposition is 60 mm, the substrate is cooled by water, and the background vacuum is 8×10 -4 Pa, working pressure 0.5 Pa, DC power 150 W, argon flow 30 ml min -1 (99.99% high-purity argon).

[0038] (4) TiN coating deposited by magnetron sputtering

[0039] Under the mixed conditions of nitrogen (99.99% high-purity nitrogen) and argon (99.99% high-purity a...

Embodiment 3

[0042] The operation methods of step (1) and step (2) are as shown in Example 1.

[0043] (3) Gradient bias Ti transition layer

[0044] Put the tray with the magnesium alloy substrate into the sputtering chamber, and the target material used for sputtering is metal Ti (diameter 80mm, thickness 5mm) with a purity of 99.8%. The Ti transition layer was deposited by DC gradient bias method, that is, the gradient bias voltage was -5V / -10V / -20V / -35V / -50V, each bias condition was deposited for 2 minutes, and the total deposition time of the transition layer was 10 minutes. The distance between the target and the substrate during deposition is 60 mm, the substrate is cooled by water, and the background vacuum is 7×10 -4 Pa, working pressure 0.5 Pa, DC power 150 W, argon flow 30 ml min -1 (99.99% high-purity argon).

[0045] (4) TiN coating deposited by magnetron sputtering

[0046] Under the mixed conditions of nitrogen (99.99% high-purity nitrogen) and argon (99.99% high-purity...

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Abstract

The invention discloses a method for improving the bonding property of a magnetron sputtering TiN coating on a biomedical magnesium alloy surface. According to the method, firstly, the biomedical magnesium alloy surface is pretreated, then, a Ti transition layer is deposited on the magnesium alloy surface through a direct-current gradient bias voltage process, the gradient bias voltage range is from zero V to minus 50 V, and finally the TiN coating is deposited on the surface of the Ti transition layer by adopting a direct-current magnetron sputtering method. According to the method, through a direct-current magnetron sputtering process, the TiN coating is successfully manufactured on the novel biomedical magnesium alloy surface, under the technological condition, gradient bias sedimentary transition is carried out on the Ti layer, and therefore the TiN coating is bonded with a substrate well, and the coating with the total thickness about 800 nm to 2.5 micrometers can be manufactured. The surface of the coating is complete, continuous and smooth, and the thickness of the coating can be coordinately controlled through the deposition time and nitrogen flow ratio. The TiN coating on the magnesium alloy surface can reduce magnesium alloy friction coefficients, and therefore the application of biomedical magnesium alloy in the medical implanted part aspect can be met.

Description

technical field [0001] The invention belongs to a magnetron sputtering process method, in particular to a magnetron sputtering TiN coating process on the surface of a biomedical magnesium alloy, and belongs to the technical field of magnesium alloy surface modification. Background technique [0002] Witte et al found that AZ series magnesium alloys are safe in the early stage after implanted in animals, and have a certain effect of inducing new bone formation, so they have good medical prospects, thus opening the prelude to the medical research of magnesium alloys in the 21st century. However, the soft surface and easy corrosion are important problems that need to be solved. The surface treatment technologies of medical magnesium alloys that have been reported so far mainly include: chemical conversion method, electrodeposition method, micro-arc oxidation, organic coating, ion implantation, sol-gel method, etc. Magnesium alloy surface coatings include bioactive ceramic...

Claims

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Application Information

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IPC IPC(8): C23C14/35C23C14/06C23C14/16A61L27/42A61L27/30
Inventor 谈淑咏章晓波王章忠巴志新毛向阳
Owner NANJING INST OF TECH
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