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N type PERC crystalline silicon solar cell and preparation method thereof

A technology of solar cells and crystalline silicon, applied in circuits, photovoltaic power generation, electrical components, etc., can solve problems such as scarcity of technical solutions, and achieve the effects of improving technical assurance, convenient operation, and good economic benefits

Inactive Publication Date: 2014-12-17
ALTUSVIA ENERGY TAICANG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] At present, the back passivation battery technology is relatively mature for P-type batteries, but the technical solutions for industrial production of N-type batteries are still relatively scarce.

Method used

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  • N type PERC crystalline silicon solar cell and preparation method thereof

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Comparison scheme
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Embodiment 1

[0041] In this embodiment, a 156mm N-type single crystal silicon wafer is used as the base material to remove damage, texture, and clean the N-type silicon wafer; a P-type emitter junction is formed by using tubular boron diffusion, and the diffusion resistance is controlled at 80 ohm / sq. The borosilicate glass naturally formed by diffusion is used as the front mask of the battery to achieve the purpose of removing the reflective junction and polishing on the back of the silicon wafer. Clean with 1% hydrofluoric acid solution. An aluminum oxide passivation film with a thickness of 15nm is symmetrically grown on the front and back of the silicon wafer, and a silicon nitride anti-reflection film with a refractive index of 2.10 and a thickness of 68nm is grown on the front of the silicon wafer by PECVD. Print silver-aluminum paste grid lines on the front side of the silicon wafer and sinter the metal to metallize the electrodes. On the back side of the silicon wafer, use a line a...

Embodiment 2

[0045] In this embodiment, a 156mm N-type single crystal silicon wafer is used as the base material to remove damage, texture, and clean the N-type silicon wafer; a P-type emitter junction is formed by using tubular boron diffusion, and the diffusion resistance is controlled at 45 ohm / sq. The borosilicate glass naturally formed by diffusion is used as the front mask of the battery to achieve the purpose of removing the reflective junction and polishing on the back of the silicon wafer. Clean with 1% hydrofluoric acid solution. An aluminum oxide passivation film with a thickness of 2nm is symmetrically grown on the front and back of the silicon wafer, and a silicon nitride anti-reflection film with a refractive index of 1.9 and a thickness of 90nm is grown on the front of the silicon wafer by PECVD. The front side of the silicon wafer is printed with silver-aluminum paste grid lines and sintered metal to metallize the electrodes. On the back of the silicon wafer, the aluminum o...

Embodiment 3

[0049]In this embodiment, a 156mm N-type single crystal silicon wafer is used as the base material to remove damage, texture, and clean the N-type silicon wafer; a P-type emitter junction is formed by using tubular boron diffusion, and the diffusion resistance is controlled at 140 ohm / sq. The borosilicate glass naturally formed by diffusion is used as the front mask of the battery to achieve the purpose of removing the reflective junction and polishing on the back of the silicon wafer. Clean with 1% hydrofluoric acid solution. An aluminum oxide passivation film with a thickness of 40nm is symmetrically grown on the front and back of the silicon wafer, and a silicon nitride antireflection film with a refractive index of 2.3 and a thickness of 50nm is grown on the front of the silicon wafer by PECVD. Silver-aluminum paste grid lines are printed on the front side of the silicon wafer and the metal is sintered to metallize the electrodes. On the back side of the silicon wafer, the...

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Abstract

The invention discloses an N type PERC crystalline silicon solar cell and preparation method thereof, the N type silicon sheet having a specific resistance of 0.5-12ohm is used as the base body, and the front side is provided with the boron diffusion P type emitter junction and silk-screen printing argentalium electrode, and the reverse side is orderly provided with aluminium oxide passive film and evaporation aluminum layer from the upper part to the lower part, the aluminium oxide passive film is provided with the dot matrix or line shape hollow, the evaporation aluminum layer contacts the silicon base body through the aluminium oxide passive film. Some silicon base is naked for the hollow of the aluminium oxide passive film, and the silicon base body partially contacts the evaporation aluminum layer. The back passivation is combined with the metallized area local contact, the double deposit for aluminium oxide is adopted for simplifying the step of depositing the film at the back, the negative fixed charge of aluminium oxide at the back can induce a layer of inversion layer on the N type silicon base body for exhausting the majority of carriers on the surface for getting good back surface passivation effect. The efficiency is high and the cost is low, the preparation method is simple, the operation is convenient and the economic benefit is good.

Description

[0001] technical field [0002] The invention belongs to the technical field of photovoltaics, and in particular relates to an N-type PERC crystalline silicon solar cell and a preparation method thereof. Background technique [0003] Compared with P-type silicon wafers, N-type silicon wafers have a higher minority carrier lifetime and are less sensitive to metal impurities. In addition, boron atoms that are not artificially doped in the matrix will not form boron-oxygen recombination pairs. , so N-type cells have no light-induced attenuation. The above reasons make N-type silicon wafers the darling of crystalline silicon cells in colleges and universities, but there are advantages and disadvantages. The process of N-type silicon wafers is relatively complicated and the preparation cost is relatively high. It is still a P-type battery. [0004] At present, the back passivation battery technology is relatively mature for P-type batteries, but the technical solutions for indus...

Claims

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Application Information

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IPC IPC(8): H01L31/068H01L31/0216H01L31/18
CPCH01L31/02168H01L31/1804H01L31/1868Y02E10/547Y02P70/50
Inventor 夏正月高艳涛崔会英钱亮何锐张斌邢国强
Owner ALTUSVIA ENERGY TAICANG
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