Amorphous silicon membrane solar battery with gradually-changed germanium component intrinsic layer and preparation method of amorphous silicon membrane solar battery
An amorphous silicon thin film, solar cell technology, applied in circuits, photovoltaic power generation, electrical components, etc., can solve the problems of low conversion efficiency of silicon-based thin film solar cells, strange refractive indices of glass and air, high cost, etc. Conversion efficiency, improvement of anti-reflection effect, and effect of broadening the spectral response range
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[0033] The present invention is described in further detail now in conjunction with accompanying drawing. These drawings are all simplified schematic diagrams, which only illustrate the basic structure of the present invention in a schematic manner, so they only show the configurations related to the present invention.
[0034] Such as figure 1 The present embodiment shown provides an amorphous silicon thin-film solar cell with a graded germanium composition intrinsic layer, which successively includes a silicon nitride (SiN) thin film, a glass layer (glass) 4, and a thickness of 500 nm; Transparent conductive film (TCO) 5, the thickness is 10nm; P-type heavily doped microcrystalline Si film (p + uc-Si) 6 with a thickness of 6nm; P-type heavily doped hydrogenated single crystal silicon carbide (a-Si:H) buffer layer 7 with a thickness of 15nm; P-type lightly doped hydrogenated amorphous silicon (a-Si:H) ) 8 with a thickness of 10nm; intrinsic hydrogenated amorphous silicon ge...
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