Chip-integrated 2-micrometer wavelength micro laser

Abstract

The invention discloses a chip-integrated 2-micrometer wavelength micro laser. The chip-integrated 2-micrometer wavelength micro laser comprises a rare earth doping monox micro ring core cavity and a micro-nano fiber, wherein the micro-nano fiber is located on one side of the monox micro ring core cavity. The monox micro ring core cavity is prepared through the following steps that (1) a rare earth doping monox film is prepared on the surface of a silicon wafer through a sol-gel method; (2) a monox micro disc cavity is prepared on the surface of the monox film through a photoetching process and an etching process; (3) heating reflux treatment is carried out on the monox micro disc cavity through a carbon dioxide laser to obtain the monox micro ring core cavity. The 2-micrometer wavelength micro laser prepared through the sol-gel rare earth doping method has the advantages of being integrated in chip, micro, stable, low in threshold and the like, the energy mode volume in the cavity can be optimized according to the carbon dioxide laser reflux power and time, and a laser with a higher quality is obtained.

Description

technical field

[0001] The invention belongs to the field of micro-nano optical devices, and in particular relates to a 2-micron-wavelength micro-laser prepared by using a sol-gel rare earth doping method. Background technique

[0002] Lasers with a wavelength of 2 microns are within the spectral range of human eye safety, can be widely used in laser surgery, and have unique advantages in laser sensing, material processing, and space communication. In addition, micro lasers are very important integrated optical and electronic components, and have broad application prospects in optical integrated circuits, information processing, and biosensing. Nowadays, silicon oxide microdisk cavity or microring core cavity can be well prepared using mature integration process. At the same time, the coupling of micro-nano fiber and micro-disk cavity or micro-ring core cavity to prepare lasers has become a very popular research subject, and the micro-ring core cavity laser has the advantag...

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