Organic electroluminescence device and production method thereof
An electroluminescent device and electroluminescent technology, which are applied in the fields of electro-solid devices, semiconductor/solid-state device manufacturing, electrical components, etc., can solve the problems of water vapor affecting electrical properties, poor water blocking ability, etc. Corrosive and stress durability, and the effect of strong water and oxygen resistance
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[0040] The method for preparing the above organic electroluminescent device specifically includes the following steps:
[0041] (A) Using a vacuum evaporation method to sequentially form a hole injection layer, a hole transport layer, a light emitting layer, an electron transport layer, an electron injection layer and a cathode layer on the cleaned anode conductive substrate;
[0042] (B) On the cathode layer, a plasma-enhanced chemical vapor deposition method is used to prepare a first organic barrier layer, and then a magnetron sputtering method is used to prepare a first inorganic barrier layer on the organic barrier layer. A plasma-enhanced chemical vapor deposition method is used to prepare a second organic barrier layer on the first inorganic barrier layer. Finally, a magnetron sputtering method is used to prepare a second inorganic barrier layer on the organic barrier layer. The barrier layer, the first inorganic barrier layer, the second organic barrier layer, and the secon...
Embodiment 1
[0055] Such as figure 1 As shown, the organic electroluminescent device of this embodiment has a layered structure, and each layer is in order: anode conductive substrate 101, hole injection layer 102, hole transport layer 103, light emitting layer 104, electron transport layer 105, electron injection The layer 106, the cathode layer 107, the first organic barrier layer 108, the first inorganic barrier layer 109, the second organic barrier layer 110, and the second inorganic barrier layer 111 are sequentially overlapped.
[0056] The structure of the organic electroluminescent device is ITO / MoO 3 :NPB / TCTA / TPBI:Ir(ppy) 3 / Bphen / CsN 3 :Bphen / Al / SiOxNy / SiC:MgAl 2 O 4 / SiOxNy / SiC:CdS, where: the oblique bar " / " indicates a layered structure, and the colon ":" indicates mutual doping. Specifically (in the following embodiments, the doping method here is the same as that in Embodiment 1, and will not be repeated here):
[0057] ITO is the material of the anode conductive substrate 101; ...
Embodiment 2
[0081] Such as figure 2 As shown, the organic electroluminescent device of this embodiment has a layered structure, and each layer is in order: anode conductive substrate 201, hole injection layer 202, hole transport layer 203, light emitting layer 204, electron transport layer 205, electron injection The layer 206, the cathode layer 207, the first organic barrier layer 208, the first inorganic barrier layer 209, the second organic barrier layer 210, and the second inorganic barrier layer 211 are sequentially overlapped.
[0082] The structure of the organic electroluminescent device is ITO / MoO 3 :NPB / TCTA / TPBI:Ir(ppy) 3 / Bphen / CsN 3 :Bphen / Al / SiOxNy / WC:Bi 2 Ti 4 O 11 / SiOxNy / PbS:WC, where: the oblique bar " / " represents the layered structure, the colon ":" represents mutual doping (the material of each layer of this embodiment is not exactly the same as that of embodiment 1, but the method of doping It is the same as embodiment 1, and will not be repeated).
[0083] The above-men...
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