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Organic electroluminescent device and production method thereof

An electroluminescent device and luminescence technology, which is applied in the direction of electric solid-state devices, semiconductor/solid-state device manufacturing, electrical components, etc., can solve the problems of desiccant loss of absorption capacity, device life reduction, and easy cracks, etc., to achieve a good level Coverage and large-area thickness uniformity, low impact, and strong adhesion effects

Inactive Publication Date: 2015-05-20
OCEANS KING LIGHTING SCI&TECH CO LTD +2
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

As the desiccant in the device absorbs a large amount of oxygen and water vapor, the desiccant loses its absorption capacity in a short period of time, resulting in the gradual accumulation of oxygen and water vapor in the device, which significantly reduces the life of the device; the glass cover usually used Or the metal cover plate is a brittle material, which is prone to cracks, and the resulting device will appear very heavy, which is not suitable for flexible devices

Method used

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  • Organic electroluminescent device and production method thereof
  • Organic electroluminescent device and production method thereof
  • Organic electroluminescent device and production method thereof

Examples

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Embodiment 1

[0057] figure 1 is a schematic diagram of the organic electroluminescent device in embodiment 1; as figure 1 As shown, the organic electroluminescent device includes an ITO glass substrate (11), an organic light-emitting functional layer (12), a cathode (13) and an encapsulation layer (20); the encapsulation layer (20) includes five silicon oxynitride films An encapsulation unit composed of a layer (21) and an inorganic barrier layer (22).

[0058] A method for preparing an organic electroluminescent device, comprising the steps of:

[0059] (1) Pre-treatment of ITO glass substrate (11): First, clean the ITO glass with acetone, ethanol, deionized water, and ethanol in sequence, all of which are cleaned with an ultrasonic cleaner. dry, oven dry stand-by; then carry out surface activation treatment to the cleaned ITO glass, to increase the oxygen content of the conductive surface layer, improve the work function of the conductive layer surface; the thickness of the ITO glass s...

Embodiment 2

[0075] A method for preparing an organic electroluminescent device, comprising the steps of:

[0076] (1), (2), (3) are the same as embodiment 1;

[0077] (4) Preparation of encapsulation layer:

[0078] a) Preparation of silicon oxynitride film layer: a silicon oxynitride film layer was prepared on the cathode surface by plasma enhanced chemical vapor deposition (PECVD), the working pressure was 50Pa, the deposition temperature was 60°C, and the radio frequency power was 300W; The gas sources used in the process of depositing the silicon oxynitride layer are hexamethyldisilamine (HMDS), ammonia (NH 3 ) and oxygen (O 2 ), the loading gas is argon (Ar); the flow rate of hexamethyldisilamine (HMDS) is 14sccm, ammonia (NH 3 ) flow rate of 18sccm, oxygen (O 2 ) flow rate is 18 sccm, the flow rate of argon (Ar) is 80 sccm, and the thickness of the silicon oxynitride film layer is 190 nm;

[0079] b) Preparation of inorganic barrier layer: Atomic layer deposition (ALD) was used...

Embodiment 3

[0083] A method for preparing an organic electroluminescent device, comprising the steps of:

[0084] (1), (2), (3) are the same as embodiment 1;

[0085] (4) Preparation of encapsulation layer:

[0086] a) Preparation of silicon oxynitride film layer: a silicon oxynitride film layer was prepared on the cathode surface by plasma enhanced chemical vapor deposition (PECVD), the working pressure was 10Pa, the deposition temperature was 40°C, and the radio frequency power was 100W; The gas sources used in the process of depositing the silicon oxynitride layer are hexamethyldisilamine (HMDS), ammonia (NH 3 ) and oxygen (O 2 ), the loading gas is argon (Ar); the flow rate of hexamethyldisilamine (HMDS) is 12 sccm, ammonia (NH 3 ) flow rate is 15sccm, oxygen (O 2 ) flow rate is 16 sccm, the flow rate of argon (Ar) is 76 sccm, and the thickness of the silicon oxynitride film layer is 180 nm;

[0087] b) Preparation of inorganic barrier layer: Atomic layer deposition (ALD) is used...

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Abstract

The invention discloses an organic electroluminescent device comprising an anodic conductive substrate, an organic luminescent function layer, a cathode and a sealing layer. The organic luminescent function layer, the cathode and the sealing layer are stacked in order on the cathodic conductive substrate. The sealing layer comprises a silicon oxynitride film layer and an inorganic barrier layer stacked in order on the surface of the cathode; the silicon oxynitride film layer is made of silicon oxynitride; the inorganic barrier layer is made of beryllium oxide, beryllium oxide, calcium oxide, strontium oxide or barium oxide. The sealing layer is highly compact, erosion of organic compounds and the electrode in the organic electroluminescent device by matters such as oxygen and water is effectively decreased; life of a device, especially a flexible device, is prolonged to 15000 hours and above (T70@1000cd / m<2>); the invention further provides a production method of the organic electroluminescent device.

Description

technical field [0001] The invention relates to the technical field of organic electroluminescent devices, in particular to an organic electroluminescent device and a preparation method thereof. Background technique [0002] Currently, organic electroluminescent devices (OLEDs) suffer from a short lifetime, which is mainly caused by the intrusion of oxygen and water vapor. On the one hand, oxygen is a quencher, which will significantly reduce the quantum efficiency of luminescence. At the same time, oxygen will oxidize the luminescent layer, and the carbonyl compound produced is also an effective quencher; on the other hand, the influence of water vapor is more obvious, it The main way of destruction is to make the organic compound in the device hydrolyze, and also react with the metal cathode, which greatly reduces its stability, resulting in device failure and reduced service life. Therefore, in order to effectively suppress the degradation and failure of organic electrol...

Claims

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Application Information

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IPC IPC(8): H01L51/52H01L51/54H01L51/56
CPCH10K50/84H10K71/00
Inventor 周明杰钟铁涛王平冯小明
Owner OCEANS KING LIGHTING SCI&TECH CO LTD
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