Process for preparing graphene through RF-PECVD

Abstract

The present invention discloses a process for preparing graphene through RF-PECVD. The technical scheme comprises that: a radio frequency plasma enhanced chemical vapor deposition (RF-PECVD) method is adopted and a polycrystal cobalt film prepared by adopting a magnetron sputtering film plating system is adopted as a substrate to successfully prepare high-quality graphene having 1-5 carbon atom layers at a low substrate temperature (800 DEG C) under less total gas flow rate (78 sccm) within a short deposition time (40 s). The process of the present invention has the following characteristics that: the graphene can be prepared under the conditions of the relatively low reaction temperature, the short deposition time and the less requirement of the carbon source through the RF-PECVD method so as to substantially reduce the graphene preparation cost and establish the foundation for the promotion of the industrial application of the graphene; and the graphene has excellent physical properties of high specific surface area, high optical transmittance, high electrical conductivity, high flexibility and the like, such that the graphene has wide application values in the fields of electronic devices, optical devices and the like.

Description

technical field [0001] The invention discloses a process for preparing graphene by RF-PECVD. Background technique [0002] Carbon nanomaterials, from amorphous amorphous carbon to crystalline natural graphite, from zero-dimensional fullerene (C 60 ) to one-dimensional carbon nanotubes (CNTs), have been favored by the majority of scientific researchers. These carbon materials have brought endless scientific new ideas to scientific researchers. The emergence of two-dimensional graphene (Graphene) not only enriches the family of carbon materials, but also because of its special structure and excellent properties, its light gradually surpasses other members of the carbon family and becomes a more researched material. Significance and application value of carbon material graphene is composed of single layer sp 2 A two-dimensional honeycomb lattice structure material composed of hybrid carbon atoms, which can exhibit extremely high electron mobility, excellent thermodynamic stab...

AI Technical Summary

Problems solved by technology

At present, although the research on graphene has made great progress in theory and experiment, however, there are still many problems to be further explored and studied, both in the preparation of graphene and in the application of graphene. For example: how to reduce the cost of graphene preparation, what is the growth mechanism of graphene, how to modulate the structure of graphene, whether the performance of graphene-based composite materials can be further developed or improved, etc.

Among the many methods for preparing graphene, the chemical vapor deposition (CVD) method is one of the most effective methods for preparing large-area, high-quality graphene. However, this method requires extremely high reaction temperature and more carbon sources. , limiting its application in industrial