A method for processing powder samples for argon ion beam cutting

Abstract

The invention relates to a processing method for a powder sample used for argon ion beam cutting, comprising: mixing a resin with a hardener to obtain a first mixture, mixing the first mixture with a powder sample to obtain a second mixture, and placing the second mixture on a carrier On the glass slide, vacuum in a vacuum desiccator; take a cover glass, scrape the second mixture on the glass slide onto the cover glass, and spread the second mixture in a semicircle at the edge of one side of the cover glass , and then put the cover glass on a temperature-controlled heating platform to cure to obtain a cover glass with the first cured resin; apply the first mixture to the cover glass with the first cured resin, and the thickness of the smear is the same as that on the cover glass The highest point of the first cured resin is even, and then the cover glass is turned upside down on the silicon wafer, and cured on a temperature-controlled heating platform. The first mixture coated on the cover glass is cured into the second cured resin, and the embedded sample is obtained. ; The end surface of the embedded sample is polished and smoothed to expose the embedded powder sample, which can then be cut in an argon ion cutter.

Description

technical field [0001] The invention relates to a processing method for powder samples cut by argon ion beams, belonging to the field of chemistry. Background technique [0002] The scanning electron microscope (SEM) can observe the high-magnification microscopic morphology of the sample, and can also conduct qualitative and quantitative analysis of the elements on the sample surface through accessories such as energy spectrometer (EDX), or use electron backscattering diffraction analyzer (EBSD) to analyze the surface of the sample. Grain orientation and phase analysis were performed. The scanning electron microscope tests the surface depth of the sample during this observation and analysis process, usually only within 100nm depth, which has high quality requirements for sample preparation. The traditional mechanical grinding method prepares the sample section, and the section inevitably has mechanical damage and contamination caused by the abrasive embedded in the sample. ...

AI Technical Summary

Problems solved by technology

[0005] Disadvantage 1: The powder sample is scattered all over the embedding block, and the argon ion beam only cuts a small area at the top of the embedding block, so the utilization efficiency of the powder sample is not high

Especially if there are only a few powder samples and the powder samples are too dispersed in the embedding block, the number of powder samples that can be cut is very limited, which is not conducive to microscopic observation and analysis

[0006] Disadvantage 2: During the argon ion beam cutting process, the front end of the embedding block must be attached to the baffle, and the area where the embedding block is close to the baffle is cut first, and there will be ion beam damage in the form of grooves phenomenon, also loses a large observation area

[0007] Disadvantage 3: The embedding process takes a long time

[0008] Disadvantage 4: The end face and sides of the resin embedding block need to be ground flat to meet the requirements of the ion beam cutter, which increases the workload

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