The application discloses a manufacturing method of an embedded
chip substrate and a temporary bonding structure, and relates to the technical field of
semiconductor packaging, so as to solve the problem of excessive warping of the substrate in the manufacturing process. The manufacturing method of the embedded
chip substrate comprises the following steps: substrate windowing, first temporary bonding,
chip pasting, first compression and
resin embedding, second temporary bonding, first debonding, second compression and
resin embedding, second debonding, circuit manufacturing, resin
insulation layer processing, intermediate circuit manufacturing and solidification. In the method, the resin in the structure is in an incomplete solidification state before the
symmetric structure is formed, pre-solidification is performed after each resin layer is processed, and complete solidification is not performed. After all the resin
layers are processed, solidification is performed once again, so that the
symmetric structure can be formed after the low warping state is maintained, and the solidification rate is above 90%, and the resin
cracking can be effectively avoided. The temporary bonding structure is a temporary structure generated in the manufacturing method of the embedded chip substrate.