Method for preparing Na-doped molybdenum planar targets

A sodium-doped, planar target technology, applied in metal material coating process, ion implantation plating, coating and other directions, can solve the problems of high manufacturing cost, poor density of Mo-Na billet, low hot pressing temperature, etc. Achieving the effect of uniform size, narrow particle size distribution and uniform grain size

Active Publication Date: 2015-12-02
JINDUICHENG MOLYBDENUM CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] At present, there are many methods for preparing Mo-Na sputtering targets that have been reported. From the perspective of patented technologies, there are mainly hot isostatic pressing methods, conventional sintering methods, and vacuum hot pressing methods. From the analysis of these patents, The hot isostatic pressing method is a method commonly used at home and abroad. This method can prepare qualified Mo-Na sputtering targets, but its material utilization rate is low and the manufacturing cost is high; the conventional sintering method is proposed in Chinese patent 201310033234.1. This patent does not take into account...

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  • Method for preparing Na-doped molybdenum planar targets
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  • Method for preparing Na-doped molybdenum planar targets

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Embodiment 1

[0029] This embodiment includes the following steps:

[0030] Step 1. Stir the mixed powder of molybdenum powder and sodium molybdate dihydrate with deionized water evenly, and spray dry to obtain sodium-doped molybdenum particles; the average particle size of the molybdenum powder is 2.0 μm, and the particle size of the molybdenum powder is The distribution is 1 μm~10 μm, the mass content of sodium molybdate dihydrate in the mixed powder is 6.3%, the balance is molybdenum powder, and the consumption of described deionized water is 12.5% ​​of the mass of molybdenum powder;

[0031] Step 2. Put the sodium-doped molybdenum particles described in step 1 into a cold isostatic pressing mold and seal them, and carry out cold isostatic pressing on the sodium-doped molybdenum particles under a pressure of 180 MPa, and remove the cold isostatic pressure after pressing. Press the mold to obtain a slab; the cold isostatic pressing mold is preferably a cylindrical rubber sheath, and the s...

Embodiment 2

[0037] This embodiment includes the following steps:

[0038] Step 1. Stir the mixed powder of molybdenum powder and sodium molybdate dihydrate with deionized water evenly, and obtain sodium-doped molybdenum particles after spray drying; the average particle size of the molybdenum powder is 2.5 μm, and the particle size of the molybdenum powder is The distribution is 1 μm~10 μm, the mass content of sodium molybdate dihydrate in the mixed powder is 7.9%, the balance is molybdenum powder, and the consumption of described deionized water is 15% of the mass of molybdenum powder;

[0039] Step 2. Put the sodium-doped molybdenum particles described in step 1 into a cold isostatic pressing mold and seal them, and carry out cold isostatic pressing on the sodium-doped molybdenum particles under a pressure of 180 MPa, and remove the cold isostatic pressure after pressing. Press the mold to obtain a slab; the cold isostatic pressing mold is preferably a cylindrical rubber sheath, and the...

Embodiment 3

[0044] This embodiment includes the following steps:

[0045] Step 1. Stir the mixed powder of molybdenum powder and sodium molybdate dihydrate with deionized water evenly, and obtain sodium-doped molybdenum particles after spray drying; the average particle size of the molybdenum powder is 2.5 μm, and the particle size of the molybdenum powder is The distribution is 1 μm~10 μm, the mass content of sodium molybdate dihydrate in the mixed powder is 7.9%, the balance is molybdenum powder, and the consumption of described deionized water is 5% of the mass of molybdenum powder;

[0046] Step 2. Put the sodium-doped molybdenum particles described in step 1 into a cold isostatic pressing mold and seal them, and carry out cold isostatic pressing on the sodium-doped molybdenum particles under a pressure of 180 MPa, and remove the cold isostatic pressure after pressing. Press the mold to obtain a slab; the cold isostatic pressing mold is preferably a cylindrical rubber sheath, and the ...

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Abstract

The invention discloses a method for preparing Na-doped molybdenum planar targets. The method comprises the steps of firstly, stirring mixed powder of molybdenum powder and sodium molybdate dehydrate with deionized water uniformly, and performing spray drying to obtain Na-doped molybdenum particles; secondly, loading the Na-doped molybdenum particles into an isostatic cool pressing mold and sealing the mold, then performing isostatic cool pressing, and removing the isostatic cool pressing mold after pressing to obtain plate blank; thirdly, jacketing the plate blank and performing vacuumizing and sealing; and fourthly, performing hot-pressed sintering on the plate blank and then performing jacket removal treatment to obtain the Na-doped molybdenum planar targets. According to the method, the preparation cost is low, the material use rate is high, the content of Na in the targets and the structure are controllable, the product consistency is good, and the requirement for the Na-doped molybdenum planar targets for industrial production can be well met.

Description

technical field [0001] The invention belongs to the technical field of molybdenum material processing and molding, and in particular relates to a preparation method of a sodium-doped molybdenum planar target. Background technique [0002] Cu(In,Ga)Se 2 (CIGS) is a multi-component semiconductor material with excellent performance and high photoelectric conversion efficiency. Thin-film solar cells are designed based on it, and its photoelectric conversion efficiency has reached 20.4%, which is the highest level in the world. It is found that doping a small amount of alkali metal Na (about 5 at%) in CIGS can significantly improve its photoelectric conversion efficiency. For industrially produced CIGS solar panels, it is necessary to dope Na into the large-area CIGS absorber layer to improve its photoelectric conversion efficiency. Generally, lime sodium carbonate glass (SLG) is directly used as the substrate to produce CIGS solar panels, and SLG is used as the Na source mater...

Claims

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Application Information

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IPC IPC(8): C23C14/34B22F3/16
Inventor 朱琦王娜王林陈强
Owner JINDUICHENG MOLYBDENUM CO LTD
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