Gecko-inspired biomimetic dry glue and preparation method thereof

A technology for gecko and dry glue, applied in the field of bionic gecko dry glue and its preparation, can solve the problems of difficult processing of regular and ordered structures and high cost

Active Publication Date: 2016-01-13
SHENZHEN INST OF ADVANCED TECH CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In view of this, the present invention provides a bionic gecko dry glue and a preparation method thereof. The bionic gecko dry glue has a regular structure, and the bionic gecko dry glue includes a substrate and a T-shaped micro-nano structure, wherein the T-shaped micro-nano structure It includes a cylinder and a cover arranged on the top of the cylinder, and the material of the bionic gecko dry glue is ethylene-vinyl acetate copolymer (referred to as EVA). The existence of multiple covers and the EVA material in the bionic gecko dry glue structure make The bionic gecko dry glue not only has strong adhesion, but also has the advantages of high light transmittance, high tensile strength, and strong self-cleaning property; the preparation method of the bionic gecko dry glue is simple and easy to operate, which overcomes the At present, the processing cost of micro-nano composite structure is high, the process is complicated, and it is difficult to process regular and orderly structures. This method can accurately reproduce the design pattern and is suitable for mass production of bionic gecko dry glue.

Method used

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  • Gecko-inspired biomimetic dry glue and preparation method thereof
  • Gecko-inspired biomimetic dry glue and preparation method thereof
  • Gecko-inspired biomimetic dry glue and preparation method thereof

Examples

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Embodiment 1

[0074] See attached figure 1 The flow chart of the preparation method of the bionic gecko dry glue, the preparation method of a kind of bionic gecko dry glue provided in this embodiment comprises the following steps:

[0075] S101. Preparation of micro-nano structure: select a silicon substrate, which is a silicon substrate with a thermally grown silicon dioxide film with a thickness of 300 nm on the surface, spin-coat photoresist on the above-mentioned silicon substrate, expose and develop, and The micro-scale pattern on the designed mask is transferred to the surface of the spin-coated photoresist; the pattern on the photoresist is further transferred to SiO2 by reactive ion etching 2 thin surface, specifically using photoresist as a mask, using CF 4 or CHF 3 Gas plasma etch SiO 2 thin film until the silicon surface is exposed, then wash off the photoresist with a stripper or acetone, and pass through O 2 plasma cleaning;

[0076] The silicon substrate is then etched b...

Embodiment 2

[0090] A preparation method of bionic gecko dry glue, comprising the following steps:

[0091] (1) Preparation of micro-nano structure: choose a silicon substrate, the silicon substrate is a silicon substrate with thermal growth on the surface and a silicon dioxide film with a thickness of 300nm, spin-coat photoresist on the above-mentioned silicon substrate, expose, develop, Transfer the micro-scale pattern on the designed mask to the surface of the spin-coated photoresist; use reactive ion etching to further transfer the pattern on the photoresist to SiO 2 thin surface, specifically using photoresist as a mask, using CF 4 or CHF 3 Gas plasma etch SiO 2 thin film until the silicon surface is exposed, then wash off the photoresist with a stripper or acetone, and pass through O 2 plasma cleaning;

[0092] Then, the silicon substrate is etched by a vapor phase etching process until a T-shaped micro-nano structure is obtained, as follows: using XeF 2 The silicon surface is t...

Embodiment 3

[0102] See attached image 3 The flow chart of the preparation method of the bionic gecko dry glue, the preparation method of a kind of bionic gecko dry glue provided in this embodiment comprises the following steps:

[0103] S301. Prepare micro-nano structure: select a silicon substrate, spin-coat AR5460 and SU8-T3035 photoresist on the surface of the substrate sequentially as the first polymer coating and the second polymer coating, and then use SU-8 to develop agent to develop the second polymer coating to obtain specific micro or nano patterns;

[0104] Use AR300 developer to etch the first polymer coating through the developed second polymer coating; form a negative T-shaped micro-nano structure on the second polymer coating and the first polymer coating;

[0105] S302. Surface hydrophobic treatment: perform hydrophobic treatment on the surface of the above-mentioned negative T-shaped micro-nano structure, so that the surface of the negative T-shaped micro-nano structure...

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Abstract

The invention provides gecko-inspired biomimetic dry glue. The gecko-inspired biomimetic dry glue is made from ethylene vinyl acetate (EVA). The gecko-inspired biomimetic dry glue comprises a substrate and a plurality of T-shaped micro/nano structures arranged on the substrate, wherein the T-shaped micro/nano structures comprise column bodies and cover bodies arranged on the tops of the column bodies; and projections of the column bodies in a vertical direction fall into projection ranges of the cover bodies in the vertical direction. The gecko-inspired biomimetic dry glue has the advantages of high adhesive power, high light transmittance, high self-cleaning property and the like. The invention also provides a preparation method of the gecko-inspired biomimetic dry glue. The preparation method comprises the following steps: transferring the T-shaped micro/nano structures on a silicon substrate obtained by dry etching or negative T-shaped micro/nano structures on two layers of polymer coatings obtained by layer-by-layer etching with an elastomer material to prepare an elastomer stamp with a negative T-shaped structure; and repeatedly transferring the micro/nano structures onto the EVA by a soft copy method of the elastomer stamp with the negative T-shaped structure in order to obtain the gecko-inspired biomimetic dry glue made from the EVA.

Description

technical field [0001] The invention belongs to the technical field of micro-nano processing, and in particular relates to a bionic gecko dry glue and a preparation method thereof. Background technique [0002] The unique functions of organisms in nature are closely related to their surface microstructure to a large extent. For example, the paw of a gecko has a very fine micro-nano composite structure, with about 500,000 setae, and each setae has about 1,000 hairs. When in contact with a solid surface, it can produce a strong adhesive force and can quickly detach, allowing the gecko to quickly crawl on vertical ceilings and parallel walls. At the same time, the micro-nano composite structure of the gecko's feet is super-hydrophobic, and sewage is not easy to adsorb and deposit on its surface, and it has self-cleaning characteristics. [0003] Gecko's dry adhesion is superior to other adsorption principles, and it is universal to the environment and walls. Biomimetic micro-...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81B1/00B81C1/00C09J123/08
Inventor 吴天准袁丽芳王智伟王磊
Owner SHENZHEN INST OF ADVANCED TECH CHINESE ACAD OF SCI
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