Electrolyte and technique for preparing high-surface-quality barium strontium titanium ferroelectric film through micro-arc oxidation

A technology of barium strontium titanate and ferroelectric thin film, which is applied in the field of electrolyte for preparing high surface quality barium strontium titanate ferroelectric thin film by micro-arc oxidation, which can solve the problems of loose film surface, affecting film performance, and large roughness value , to achieve the effect of uniform diameter, good stability and simple preparation

Inactive Publication Date: 2016-01-13
GUANGDONG POLYTECHNIC NORMAL UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Since MAO film formation must rely on arc discharge, which leads to local high temperature, resulting in loose, uneven and large roughness on the surface of the film, this defect seriously affects the performance of the film

Method used

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  • Electrolyte and technique for preparing high-surface-quality barium strontium titanium ferroelectric film through micro-arc oxidation
  • Electrolyte and technique for preparing high-surface-quality barium strontium titanium ferroelectric film through micro-arc oxidation
  • Electrolyte and technique for preparing high-surface-quality barium strontium titanium ferroelectric film through micro-arc oxidation

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0046] In-situ growth of barium strontium titanate ferroelectric thin film on commercially pure titanium TA2 specifically includes the following steps:

[0047] (1) Sample preparation: Cut the Ti plate into a substrate of 40*20*2mm, and grind the Ti substrate step by step with 180# to 1000# sandpaper until the surface is bright and smooth.

[0048] (2) Pre-treatment of the sample: Wash the polished Ti sheet in acetone and deionized water respectively, and dry it for later use.

[0049] (3) Electrolyte preparation: 0.5mol / LBa(OH) 2 , 0.5mol / LSr(OH) 2 and 0.02mol / LPVP as the solute, and deionized water as the solvent to prepare 1L electrolyte. The prepared electrolyte was stirred on a magnetic heating stirrer for 30 minutes, the heating temperature was set at 60° C., and the rotation speed was 1500 r / min.

[0050] (4) Ferroelectric thin film preparation: connect the titanium sheet pretreated in steps (1) and (2) to the anode, and place it in the electrolyte solution in step (...

Embodiment 2

[0053] In this embodiment, except for the composition of the electrolyte, other features are the same as those in Embodiment 1.

[0054] The electrolyte composition is as follows: with 0.5mol / LBa(OH) 2 , 0.5mol / LSr(OH) 2 and 0.03mol / LPVP as the solute, and deionized water as the solvent to prepare 1L of electrolyte.

[0055] Gained thin film phase composition and surface appearance are similar to embodiment 1, and its SEM figure is as follows figure 2 (d) shown. The surface roughness of the film is about 0.377um, and the micro-arc oxidation hole diameter is about 300-800nm. The hysteresis loop of the thin film measured by the RADIANT Precision Premier II system is as follows: image 3 As shown in (d), under the conditions of 250V applied electric field and 50Hz frequency, the remnant polarization is about 18μC / cm 2 . The dielectric constant of the film is 280.2 and the dielectric loss is 0.048 under the condition of 1KHz measured by AGILENT4284APrecision LCRMETER system...

Embodiment 3

[0057] In this embodiment, except for the composition of the electrolyte, other features are the same as those in Embodiment 1.

[0058] The electrolyte composition is as follows: with 0.5mol / LBa(OH) 2 , 0.5mol / LSr(OH) 2 and 0.04mol / LPVP as the solute, and deionized water as the solvent to prepare 1L of electrolyte.

[0059] Gained thin film phase composition and surface appearance are similar to embodiment 1, and its SEM figure is as follows figure 2 (e) shown. The surface roughness of the film is about 0.303um, and the micro-arc oxidation hole diameter is about 500-700nm. The hysteresis loop of the thin film measured by the RADIANT Precision Premier II system is as follows: image 3 As shown in (e), under the condition of 500V applied electric field and 20Hz frequency, the remnant polarization is about 15μC / cm 2 . The dielectric constant of the film is 530.8 and the dielectric loss is 0.195 under the condition of 1KHz measured by AGILENT4284APrecisionLCRMETER system (...

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Abstract

The invention discloses an electrolyte and technique for preparing a high-surface-quality barium strontium titanium ferroelectric film through micro-arc oxidation. The electrolyte is prepared from barium hydroxide with the concentration of 0.2 mol / L-0.8 mol / L or barium hydroxide with the concentration of 0.2 mol / L-0.8 mol / L, strontium hydroxide with the concentration of 0.2 mol / L-0.8 mol / L or strontium hydroxide octahydrate the concentration of 0.2 mol / L-0.8 mol / L, and polyvinyl pyrrolidone (PVP) with the concentration of 0.01 mol / L-0.08 mol / L. By the adoption of the electrolyte and technique, the barium strontium titanium ferroelectric film which is provided with a smooth and compact surface and has a good a good ferroelectric property can be prepared. In addition, the technique for preparing the film is simple and can be implemented at normal temperature, post heat treatment is not needed, environmental friendliness is achieved, and pollution is avoided.

Description

technical field [0001] The invention belongs to the field of functional thin film materials, and in particular relates to an electrolyte solution for preparing strontium barium titanate ferroelectric thin films with high surface quality by micro-arc oxidation. The electrolytic solution can be used to prepare a smooth, dense and ferroelectric strontium barium titanate thin film at room temperature without subsequent heat treatment, which is environmentally friendly and has good industrial application prospects. Background technique [0002] Ferroelectric thin film materials are widely used as DRAM, microwave and piezoelectric devices, pyroelectric detectors, ferroelectric Application research on key materials of photovoltaic cells and other components. ABOs 3 type composite perovskite ferroelectric material Ba x Sr 1-x TiO 3 (BST) is BaTiO 3 (BT) and SrTiO 3 The infinite solid solution of (ST) has become one of the hot spots in the research of new functional materials ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C25D11/26
Inventor 王敏李文芳
Owner GUANGDONG POLYTECHNIC NORMAL UNIV
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