Graphene electro-optical modulator and preparation method thereof

An electro-optical modulator and graphene technology, applied in the field of optical modulation, can solve the problems of limiting the application of graphene electro-optical modulators, large insertion loss of waveguides, etc., achieving controllable pulse repetition frequency, tunable pulse width, and avoiding insertion loss. Effect

Active Publication Date: 2016-08-17
NORTHWEST UNIV(CN)
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

At present, the technology based on graphene electro-optic modulation mainly uses the waveguide as the carrier to couple the modulated light. Applications
Active Q-switching devices based on graphene electro-optic modulation that do not rely on waveguide structures have not appeared in the prior art

Method used

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  • Graphene electro-optical modulator and preparation method thereof
  • Graphene electro-optical modulator and preparation method thereof
  • Graphene electro-optical modulator and preparation method thereof

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preparation example Construction

[0041] The preparation process of the innovative graphene electro-optic modulator of the present invention is further provided below, and the preparation method of the graphene electro-optic modulator comprises the following steps:

[0042] Step 1. Clean the optical substrate:

[0043] First, immerse the quartz plate as an optical substrate in acetone (Acetone) solvent for ultrasonic cleaning for 5 minutes, then immerse in isopropanol (Isopropanol) solvent for ultrasonic cleaning for 5 minutes, and finally use a nitrogen gun to remove the isopropanol remaining on the surface of the quartz plate (Isopropanol) and blow dry.

[0044] Step 2. Transfer the underlying graphene film:

[0045] Firstly, polymethyl methacrylate (PMMA) is spin-coated on the surface of the copper foil with the graphene layer; after the PMMA is air-dried, the graphene grown on the back of the copper foil is etched clean using reactive ion etching (RIE) Then cut two copper foils with graphene attached on ...

Embodiment 1

[0060] A graphene electro-optic modulator, its optical microscopic image is attached Figure 15 As shown, it includes an optical substrate 1, a bottom graphene 2, a lower metal electrode 3, an insulating layer 4, a top graphene 5 and an upper metal electrode 6 from bottom to top, and the top graphene 5 and the bottom graphene 2 are arranged oppositely, At the same time, there is no top-layer graphene 5 directly above the lower metal electrode 3, and no bottom-layer graphene directly below the upper metal electrode 6. The optical substrate 1 is a 2*2cm double-sided polished quartz sheet with a small insertion loss, and the top layer of graphite Both the graphene 5 and the bottom graphene 2 are made of single-layer graphene, and the single-layer graphene is grown on the copper foil substrate by chemical vapor deposition, and the lower metal electrode 3 and the upper metal electrode 6 are both Ti / Au with a thickness of 5 / 50nm. The distance between the two electrodes is 500 μm. T...

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Abstract

The invention provides a graphene electro-optical modulator and a preparation method thereof. The graphene electro-optical modulator is in a plate capacitor structure and comprises an optical substrate, a bottom graphene layer, an insulating layer and a top graphene layer, and the optical substrate, the bottom graphene layer, the insulating layer and the top graphene layer are arranged sequentially from bottom to top. The top graphene layer and the bottom graphene layer are in mutual insulation through the insulating layer, the top graphene layer is above the bottom graphene layer, and an external modulation voltage is applied to the bottom graphene layer and the top graphene layer. The graphene electro-optical modulator is an active Q modulation device independent of a waveguide structure on the basis of a graphene electro-optical modulation technology; modulation depth is changed by amplitude variation of the external periodic voltage, and light modulation depth requirements of different laser parameters can be met; after the graphene electro-optical modulator is inserted into a laser, high-pulse-energy controllable-repetition-rate pulse laser output can be achieved. Therefore, the graphene electro-optical modulator has a promising market prospect.

Description

technical field [0001] The present invention relates to the technical field of light modulation, in particular to a graphene electro-optic modulation-based broadband active Q-switching device, in particular to a graphene electro-optic modulator and a preparation method thereof. Background technique [0002] Graphene is a sp 2 A one-atom-thick two-dimensional crystal composed of hybridized carbon atoms. Due to its unique atomic arrangement and energy band structure, graphene not only exhibits an ultra-fast optical response rate, but also has a constant absorption rate of 2.3% for the visible to mid-infrared band; in addition, the graphene carrier concentration can be determined by chemical atomic doping or electrical doping, wherein the excellent controllability of electrical doping provides a theoretical and technical basis for the application of graphene in photoelectric modulation devices, therefore, the development of electro-optic modulators based on graphene materials,...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02F1/03
CPCG02F1/0305G02F1/0316
Inventor 任兆玉孙志培祁媚薛晖李雕白晋涛
Owner NORTHWEST UNIV(CN)
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