A kind of preparation method of tin disulfide/tin trisulfide/stannous sulfide heterojunction film
A technology of ditin trisulfide and tin disulfide, which is applied in the field of preparation of tin disulfide/ditin trisulfide/stannous sulfide heterojunction thin films, can solve the problem of the influence of photoelectric performance of battery devices, weak combination of samples and substrates, The product shape is difficult to control and other problems, to achieve the effect of non-toxic price, rich content and low price
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Embodiment 1
[0026] 1. First, use a magnetron sputtering apparatus to sputter a metal tin film with a thickness of 100 nm on the cleaned FTO glass;
[0027] 2. Weigh 0.5 g of sublimated sulfur powder and put it in a porcelain boat, and set the temperature at 350°C in a tube furnace with a metal tin film with a thickness of 100 nm, and react for 3 hours;
[0028] 3. Magnetron sputtering a metal tin film with a thickness of 100 nm on the vulcanized film obtained above, and then vacuum sintering in a tube furnace at 350° C. for 3 hours to obtain the target product film.
Embodiment 2
[0030] 1. First, use a magnetron sputtering apparatus to sputter a metal tin film with a thickness of 150 nm on the cleaned FTO glass;
[0031] 2. Weigh 0.8 g of sublimated sulfur powder and put it in a porcelain boat, and set the temperature at 450°C in a tube furnace with a metal tin film with a thickness of 150 nm, and react for 3 hours;
[0032] 3. Magnetron sputtering a metal tin film with a thickness of 150 nm on the vulcanized film obtained above, and then vacuum sintering in a tube furnace at 450° C. for 3 hours to obtain the target product film.
Embodiment 3
[0034] 1. First, use a magnetron sputtering apparatus to sputter a metal tin film with a thickness of 50 nm on the cleaned FTO glass;
[0035] 2. Weigh 0.5 g of sublimated sulfur powder and put it in a porcelain boat, and set the temperature at 400°C in a tube furnace with a metal tin film with a thickness of 50 nm, and react for 2 hours;
[0036] 3. Magnetron sputtering a metal tin film with a thickness of 50 nm on the vulcanized film obtained above, and then vacuum sintering in a tube furnace at 400° C. for 2 hours to obtain the target product film.
[0037] The present invention mainly prepares SnS / Sn by gas-solid reaction 2 S 3 / SnS 2 Heterojunction thin films are quite different from traditional solid-phase and liquid-phase methods. Although the liquid phase method is a method that is used more often, it takes a long time to prepare a film by the liquid phase method, and the prepared film has poor adhesion. Among the non-liquid-phase methods for preparing thin films, ...
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