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Corrosion resistant coating layer with self-repair capacity and preparation method thereof

A corrosion-resistant coating and self-repairing technology, applied in the coating, metal material coating process, ion implantation plating, etc., can solve the problems of aggravated substrate corrosion, coating failure, coating peeling, etc., to improve corrosion resistance Life, enhanced corrosion resistance, high deposition rate effect

Active Publication Date: 2016-10-26
NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] 2. The coating is subjected to mechanical force for a long time, and new defects such as cracks and micro-holes will appear in the later stage of the coating. These new defects will become new corrosion channels, which will intensify the corrosion of the substrate. Once the substrate corrodes, the coating will peel off. eventually lead to coating failure

Method used

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  • Corrosion resistant coating layer with self-repair capacity and preparation method thereof
  • Corrosion resistant coating layer with self-repair capacity and preparation method thereof
  • Corrosion resistant coating layer with self-repair capacity and preparation method thereof

Examples

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Effect test

Embodiment 1

[0090] (1) Substrate cleaning

[0091] Chemical cleaning: use polished 304 stainless steel as the substrate, clean it, put in a 50% decontamination powder aqueous solution, and saturate with Na 2 CO 3 Water solution, acetone, absolute ethanol, and deionized water were each ultrasonically cleaned for 20 minutes, and then air-dried in a drying oven at a temperature of 100 °C for 2 hours.

[0092] Plasma glow etching cleaning: put the chemically cleaned substrate on the sample stage in the vacuum chamber, when the vacuum is lower than 1×10 -3 After Pa, argon gas was introduced and the pressure was maintained at 1.5 Pa, then the power was turned on and a negative bias was applied to the substrate at the same time, and the plasma glow generated by argon gas was used to etch and clean it for 10 minutes.

[0093] (2) Coating deposition

[0094] Put the cleaned matrix on the rotatable sample stage in the vacuum chamber, when the vacuum degree of the chamber is less than 2.2×10 - ...

Embodiment 2

[0101] (1) Substrate cleaning

[0102] Chemical cleaning: use polished 304 stainless steel as the substrate, clean it, put in a 50% decontamination powder aqueous solution, and saturate with Na 2 CO 3 Water solution, acetone, absolute ethanol, and deionized water were each ultrasonically cleaned for 10 minutes, and then air-dried in a drying oven at a temperature of 100°C for 2 hours.

[0103] Plasma glow etching cleaning: put the chemically cleaned substrate on the sample stage in the vacuum chamber, when the vacuum is lower than 1×10 -3 After Pa, argon gas was introduced and the pressure was maintained at 2 Pa, then the power was turned on and a negative bias was applied to the substrate at the same time, and the plasma glow generated by argon gas was used to etch and clean it for 20 minutes.

[0104] (2) Coating deposition

[0105] Put the cleaned matrix on the rotatable sample stage in the vacuum chamber, when the vacuum degree of the chamber is less than 2.2×10 - 5 P...

Embodiment 3

[0112] (1) Substrate cleaning

[0113] Chemical cleaning: use polished 304 stainless steel as the substrate, clean it, put in a 50% decontamination powder aqueous solution, and saturate with Na 2 CO 3 Water solution, acetone, absolute ethanol, and deionized water were each ultrasonically cleaned for 10 minutes, and then air-dried in a drying oven at a temperature of 100°C for 2 hours.

[0114] Plasma glow etching cleaning: put the chemically cleaned substrate on the sample stage in the vacuum chamber, when the vacuum is lower than 1×10 -3 After Pa, argon gas was introduced and the pressure was maintained at 1 Pa, then the power was turned on and a negative bias was applied to the substrate at the same time, and the plasma glow generated by argon gas was used to etch and clean it for 15 minutes.

[0115] (2) Coating deposition

[0116] Put the cleaned matrix on the rotatable sample stage in the vacuum chamber, when the vacuum degree of the chamber is less than 3.1×10 - 5 P...

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Abstract

The invention discloses a corrosion resistant coating layer with self-repair capacity. The coating layer is compounded by two phases of crystalline state Al and amorphous state Al2O3, and is represented as Al1-xOx, wherein x is 0.25-0.62, x is the atomic ratio, and the density of the coating layer is 3.0-3.4 g / cm3. The invention further discloses a preparation method of the corrosion resistant coating layer with self-repair capacity; and the preparation method comprises the steps of: (1) cleaning of a basal body; and (2) deposition of the coating layer: the cleaned basal body is put in a vacuum chamber; when the vacuum degree of a cavity is 1*10-5-5*10-5 Pa, argon and oxygen are introduced; the flow ratio of argon to oxygen is 2: 1; the sputtering air pressure is controlled as 0.25-0.4 Pa; the sputtering power density of a target is adjusted as 7.0-9.5 W / cm2; then, oxygen is gradually introduced; and when the voltage of the target reaches the lowest value, a sample baffle plate is opened for depositing the surface of the basal body to obtain the corrosion resistant coating layer with self-repair capacity. The prepared coating layer uses an Al corrosion product as a repair element for repairing through holes generated in later stress process of the coating layer to improve the corrosion resistance of the coating layer.

Description

technical field [0001] The invention relates to a corrosion-resistant coating and a preparation method thereof, in particular to a corrosion-resistant coating with self-repairing ability and a preparation method thereof. Background technique [0002] Physical vapor deposition coating, referred to as PVD coating, is widely used as a protective coating because of its good mechanical properties such as wear resistance, high hardness, and high bonding force, and is used to improve the service life of engineering equipment. However, PVD coatings cannot be simply transplanted into marine engineering equipment for the following reasons: [0003] 1. PVD coating preparation is a process away from the equilibrium state (cooling rate 10 12 -10 16 K / s), due to insufficient diffusion of deposited atoms during this process, PVD coatings often have a typical columnar crystal structure. There are often penetrating pores or defects between columnar crystals, which are Cl - 、H 2 The main...

Claims

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Application Information

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IPC IPC(8): C23C14/08C23C14/06C23C14/35
CPCC23C14/0688C23C14/081C23C14/35
Inventor 黄峰李朋葛芳芳徐相英
Owner NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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