Micro-bolometer based on graphene quantum points

Abstract

The invention provides a micro-bolometer based on graphene quantum points. The micro-bolometer comprises a substrate whose middle part is provided with a groove. The graphene quantum points are hanged above the groove and are connected through a graphene strip. Two ends of the graphene strip extend out of a graphene film to cover the substrate at two sides of the groove to form graphene electrodes. The micro-bolometer is characterized in that a hanged island-shaped graphene quantum point array is formed through the micro nano processing technology, the device temperature change in a same incident light power is increased by using the heat insulation effect by groove suspension, the device resistance temperature coefficient is raised by using quantization graphene, and the photoelectric detection is realized based on a micro-bolometer principle. Due to the absorption characteristic of a graphene material in an infrared wave band, the micro-bolometer provided by the invention can be used for the photoelectric detection of middle and far-infrared and terahertz wave bands, and a novel solution is provided for a present infrared photoelectric detector.

Description

technical field [0001] The invention belongs to the technical field of mid-far infrared and terahertz photoelectric detection, and relates to a graphene quantum dot-based microbolometer for photoelectric detection. Background technique [0002] Infrared detector is a photosensitive device that can convert infrared radiation energy into electrical energy. Due to its good environmental adaptability, good concealment, and strong anti-interference ability, it is widely used in military, meteorological, industrial, agricultural and forestry, Environmental science, public security security and medical diagnosis and other fields. [0003] In the mid-to-far infrared and terahertz bands, due to the limitation of photon energy, photon-type photodetectors generally require redundant refrigeration equipment (participate in A.Rogalski, "Infrared Detectors for the Future", ACTA PHYSICAPOLONICA A, 3,389, 2009), so currently The photodetectors in the middle and far infrared bands are mainl...

AI Technical Summary

Problems solved by technology

In terms of photon type, graphene-based photodetectors can already achieve a responsivity exceeding 1.0E+9A / W, but they are mainly concentrated in the visible light band, and it is difficult to be used in the mid-to-far infrared band

In terms of photothermal type, the thin layer characteristics of graphene and relatively weak phonon-electron interaction make the photogenerated carrier temperature of graphene material change greatly, but it is precisely because of the weak phonon-electron interaction , so the temperature coefficient of resistance is small, and special measures need to be taken to increase the temperature coefficient of resistance

According to the report in the literature (see J.Yan, M-H.Kim, et al., "Dual-gated bilayergraphene hot-electron bolometer", Nature Nanotechnology, 7,472, 2012), by using double-layer graphene as a photoresponse unit for radiometry Thermometers, temperature coefficients of resistance as high as 22kΩ / K have been achieved, however operating work is limited to less than 10K

In terms of patents, the current photodetectors based on graphene materials are mainly photon-based, such as the Chinese patent "A photodetector based on twisted double-layer graphene and its preparation method" CN201510078677 filed by Liu Zhongfan and others in 2015 .1, while photothermal-based, especially graphene-based microbolometers have relatively little patent protection

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