Micro broadband fiber micro pressure sensing device

Abstract

The invention provides a micro broadband fiber micro pressure sensing device. The micro broadband fiber micro pressure sensing device is characterized in that a long cavity fiber micro F-P cavity is utilized to implement external micro pressure sensing; the effect of the external micro pressure changes the length of the micro F-P cavity so that the spectrum characteristic of an interference signal of the micro F-P cavity is changed; and the magnitude of the micro pressure can be accurately measured through data analysis of the interference spectrum characteristic for micro F-P cavity reflection. For the micro broadband fiber micro pressure sensing device, the grinding technology is used to control the thickness and quality of a pressure sensitive terminal of the micro F-P cavity, so that the pressure response frequency can be improved and micro pressure measurement of broadband can be realized; and furthermore, a temperature compensating fiber grating can be manufactured on a reflectance spectrum signal output fiber, and with combination of signal processing, the cross sensitivity between temperature and pressure can be eliminated and highly accurate measurement of the micro pressure can be realized. The micro broadband fiber micro pressure sensing device has the advantages of micromation of the pressure sensing head, pressure response broadband, high sensitivity, anti-electromagnetic interference, no temperature crosstalk, and the like.

Description

technical field [0001] The invention relates to the technical field of optical fiber sensing, in particular to a miniature broadband optical fiber micro pressure sensing device. Background technique [0002] In the field of biomedicine, micro pressure sensing measurement technology that can invade the human body plays an important role in disease diagnosis; in high temperature, high pressure, strong electromagnetic interference and corrosive industrial environments, micro sensors are also required to test pressure . Optical fiber Fabry-Perot sensors have been favored in recent years for their advantages of sensitivity, precision, adaptability, compactness and intelligence. According to the difference of the fiber-optic F-P interferometer, the fiber-optic F-P sensor can be divided into the following three types: intrinsic fiber F-P interferometer, extrinsic fiber F-P interferometer and linear fiber F-P interferometer. The structure and manufacturing process of commonly used...

AI Technical Summary

Problems solved by technology

The structure and manufacturing process of commonly used fiber-optic peroxide-cavity sensors include all-fiber structure peroxide pressure sensors, laser-processed micro-optical fiber pressure sensors, and silicon dioxide diaphragm pressure sensors. However, there are certain defects in practical applications. For example, in the field of oil well monitoring, the fiber-optic Brillian-Perot sensor with an all-fiber structure often has adhesion phenomenon, which leads to the failure of the sensor. Normal work, etc. At the same time, due to the high cost of laser etching, it cannot be mass-produced

Since the beginning of the 21st century, the combination of optical fiber sensing technology and MEMS technology to produce a new type of optical fiber MEMS sensor has become an important factor in the production of optical fiber sensors due to its high reliability, small size, high accuracy, large dynamic range, and easy large-scale integrated production. However, due to material hysteresis, sealing problems, reflective layer delamination, etc., the stability of this sensor is poor

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