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Production method of field effect electrocatalytic hydrogen production device based on MoS2 nanosheet

A nano-sheet and field-effect technology, applied in the field of nano-materials and electrochemistry, to achieve the effects of enhancing electrical conductivity, improving catalytic performance, and reducing production costs

Active Publication Date: 2017-03-22
WUHAN UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Field effects as a simple and effective purely physical approach to enhance MoS with field effects 2 The method of catalytic hydrogen evolution performance of nanosheets has not been reported yet

Method used

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  • Production method of field effect electrocatalytic hydrogen production device based on MoS2 nanosheet
  • Production method of field effect electrocatalytic hydrogen production device based on MoS2 nanosheet
  • Production method of field effect electrocatalytic hydrogen production device based on MoS2 nanosheet

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0027] Such as Figure 10 , a MoS-based 2 A method for preparing a field-effect electrocatalytic hydrogen production device of nanosheets, comprising the steps of:

[0028] 1) MoS 2 The nanoflakes are dispersed and deposited on the surface with a layer of 300nm thick SiO 2 On a silicon substrate, MoS 2 Nano flakes are prepared by mechanical exfoliation;

[0029] 2) Electron beam etching, physical vapor deposition and other technologies are used to deposit MoS 2 Make Cr(5nm) / Au(150nm) metal electrodes on both ends of the nanosheet as source and drain;

[0030] 3) Spin-coat PMMA with a thickness of 1 to 2 μm to cover the source and drain as a protective layer, and then use electron beam etching technology on the MoS 2 A groove is carved into the nanosheet to make MoS 2 The nanosheets are partly exposed, and the prepared substrate is obtained, and its optical microscope picture and scanning electron microscope picture are as follows: figure 1 Left and right shown;

[003...

Embodiment 2

[0037] A MoS-based 2 A method for preparing a field-effect electrocatalytic hydrogen production device of nanosheets, comprising the steps of:

[0038] 1) MoS 2The nanoflakes are dispersed and deposited on the surface with a layer of 500nm thick SiO 2 On heavily doped silicon substrates, MoS 2 Nano flakes are prepared by mechanical exfoliation;

[0039] 2) Electron beam etching, physical vapor deposition and other technologies are used to deposit MoS 2 Make Cr(5nm) / Au(150nm) metal electrodes on both ends of the nanosheet as source and drain;

[0040] 3) Spin-coat PMMA with a thickness of 1 to 2 μm to cover the source and drain as a protective layer, and then use electron beam etching technology on the MoS 2 A groove is carved into the nanosheet to make MoS 2 The nanosheets are partly exposed, and the prepared substrate is obtained, and its optical microscope picture and scanning electron microscope picture are as follows: figure 1 Left and right shown;

[0041] 4) Remo...

Embodiment 3

[0045] A MoS-based 2 A method for preparing a field-effect electrocatalytic hydrogen production device of nanosheets, comprising the steps of:

[0046] 1) MoS 2 The nanoflakes are dispersed and deposited on the surface with a layer of 300nm thick SiO 2 On a silicon substrate, MoS 2 Nano flakes are prepared by mechanical exfoliation;

[0047] 2) Electron beam etching, physical vapor deposition and other technologies are used to deposit MoS 2 Make Cr(5nm) / Au(150nm) metal electrodes on both ends of the nanosheet as source and drain;

[0048] 3) Spin-coat PMMA with a thickness of 1 to 2 μm to cover the source and drain as a protective layer, and then use electron beam etching technology on the MoS 2 A groove is carved into the nanosheet to make MoS 2 The nanosheets are partly exposed, and the prepared substrate is obtained, and its optical microscope picture and scanning electron microscope picture are as follows: figure 1 Left and right shown;

[0049] 4) Remove the oxide...

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Abstract

The invention relates to a production method of a field effect electrocatalytic hydrogen production device based on a MoS2 nanosheet. The method comprises the following steps: dispersing at least one molybdenum disulfide nanosheet on a silicon substrate with an oxidation layer, and making a metal source electrode and a drain electrode at two ends of the nanosheet adopted as a channel material, wherein the oxidation layer is adopted as a dielectric layer; spin-coating an insulating layer to cover the metal source electrode and the drain electrode; etching a groove between the metal source electrode and the drain electrode; and removing the oxidation layer from the blank side of the silicon substrate, making a contact point of a back gate electrode, and injecting an electrolyte to the surface of a device to obtain the field effect electrocatalytic hydrogen production device. The field effect electrocatalytic hydrogen production device substitutes a platinum series precious metal in the field of catalytic hydrogen production, and the production method has the advantages of simple technology, production cost reduction, provision of a guiding strategy for improvement of the catalysis performance of other semiconductor materials, and facilitation of researches of relevant fields in the future.

Description

technical field [0001] The invention belongs to the technical field of nanomaterials and electrochemistry, in particular to a MoS-based 2 A method for preparing a field-effect electrocatalytic hydrogen production device of nanoflakes. Background technique [0002] Since the beginning of the 21st century, energy problems have become increasingly prominent, and traditional resources such as coal and oil are increasingly depleted. Therefore, it is very necessary to find clean and efficient new energy sources. As a clean, environmentally friendly and high-energy energy source, hydrogen energy will occupy a place in the future energy system. At present, the mature industrial hydrogen production methods include steam reforming, coal gasification and electrolysis of water to produce hydrogen. The first two methods use natural gas and coal as raw materials, which are easy to pollute the environment and aggravate the depletion of fossil fuels; hydrogen production by electrolysis of...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C25B11/06C25B1/04
CPCC25B1/04C25B11/04Y02E60/36
Inventor 麦立强周训标王俊辉晏梦雨
Owner WUHAN UNIV OF TECH