Biological modification equipment employing high-density and low-energy ion beams of hot cathode
A low-energy ion beam and biological modification technology, which is applied in the field of hot cathode high-density low-energy ion beam biological modification equipment, can solve the problems of low ion beam density, high maintenance cost of ion source, easy evaporation and burnout, etc. High beam current density, high emission density, and obvious effect
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[0014] Such as figure 1 As shown, the ion beam biomodification equipment includes an experimental chamber 1, an ion source 2 placed outside the inlet end of the experimental chamber, and an object stage 3 placed in the experimental chamber for placing samples.
[0015] The ion source 2 includes a heating wire 22, a LaB6 block cathode 23, and an anode 24 arranged sequentially in the ionization chamber 21 along the air intake direction. The ionization chamber is connected to the experimental chamber through an extraction system 4. The cathode 23 excites the arc discharge plasma, which is accelerated by the extraction system to biomodify the sample on the stage 3 . Block cathodes include not only large-area block LaB6 cathodes, but also oxide cathodes (such as zirconia) and other special cathode materials with large electron emission. The advantages are high initial electron density and high ion density. high.
[0016] The heating wire 22 is connected with a heating power suppl...
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