Method for preparing lanthanum titanate thin film through sol coating method

A technology for preparing lanthanum titanate and coating method, applied in coating, metal material coating process, liquid chemical plating and other directions, can solve the problems of optical transmittance and electrical conductivity need to be improved, and improve the affinity performance. , The effect of improving conductivity and simple process

Inactive Publication Date: 2017-06-20
SUZHOU NANER MATERIAL TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] After searching the existing technologies, most of the technologies use inks prepared from various conductive substances to coat or spray on flexible substrates to form flexible transparent con

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0015] Use Si(100) as the substrate, and gently scrub the surface of the substrate with alcohol cotton balls repeatedly to remove organic matter on the surface; put the scrubbed substrate into a beaker filled with acetone, and clean it in an ultrasonic cleaning tank for 10 minutes; Finally, put the substrate in nitric acid and let it soak for 2 hours; take out the substrate and put it in deionized water and let it stand for 2 hours to remove the nitric acid on the surface; put it in a fume hood and let it stand for 5 hours to dry.

[0016] Use ethylene glycol methyl ether as a solvent and prepare a green transparent solution with lanthanum nitrate, titanium acetate and silver nitrate as solutes, in which La 3+ 、Ti 2+ and Ag + The molar ratio of La is 1:1:0.05, La 3+ The molar concentration is 0.1mol / L; drop the prepared green transparent solution onto the substrate for spin-coating, first spin-coat at a rate of 500 rpm for 5 seconds, and then spin-coat at a rate of 2500 rpm ...

Embodiment 2

[0018] Use Si(100) as the substrate, and gently scrub the surface of the substrate with alcohol cotton balls repeatedly to remove organic matter on the surface; put the scrubbed substrate into a beaker filled with acetone, and clean it in an ultrasonic cleaning tank for 15 minutes; Finally, put the substrate in nitric acid and let it soak for 4 hours; take out the substrate and put it in deionized water and let it stand for 3 hours to remove the nitric acid on the surface; put it in a fume hood and let it stand for 10 hours to dry.

[0019] Use ethylene glycol methyl ether as a solvent and prepare a green transparent solution with lanthanum nitrate, titanium acetate and silver nitrate as solutes, in which La 3+ 、Ti 2+ and Ag + The molar ratio of La is 1:1:0.1, La 3+ The molar concentration is 0.1mol / L; drop the prepared green transparent solution onto the substrate for spin-coating, first spin-coat at a rate of 800 rpm for 10 seconds, and then spin-coat at a rate of 3500 rpm...

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PUM

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Abstract

The invention discloses a method for preparing lanthanum titanate film by sol coating method. The invention can well improve its affinity for conductive sol by pretreating the surface of the silicon substrate, so that the conductive sol is more uniform during the spraying process. are distributed on the surface of the silicon substrate, and the lanthanum titanate conductive thin film material prepared by the chemical solution deposition method in the present invention effectively improves the conductivity of the lanthanum titanate conductive thin film material, and has the advantages of simple process.

Description

technical field [0001] The invention relates to the field of conductive materials, in particular to a method for preparing a lanthanum titanate thin film by a sol coating method. Background technique [0002] Transparent conductive film is a basic optoelectronic material with both high conductivity and high transparency in the visible light band. It is widely used in optoelectronic display fields such as displays, light-emitting devices, solar cells, sensors, and flexible touch screens, and has broad commercial application prospects. [0003] Lanthanum titanate is a metal oxide with a perovskite structure, which has excellent properties in many aspects, such as room temperature conductivity and low preparation cost. These excellent properties of the lanthanum titanate conductive thin film material determine that the lanthanum titanate conductive thin film can be used not only as the bottom electrode of the ferroelectric thin film, but also as a buffer layer of the ferroelect...

Claims

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Application Information

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IPC IPC(8): C23C18/12
CPCC23C18/1225C23C18/1295
Inventor 不公告发明人
Owner SUZHOU NANER MATERIAL TECH CO LTD
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