The invention relates to the technical field of functional
oxide thin film materials, in particular to a preparation method and application of a LaNiO3 thin film based on monoethanolamine regulation and control, and the preparation method comprises the following steps: S1, dissolving a
lanthanum source and a
nickel source in an
organic solvent to prepare a LaNiO3 precursor solution; and S2, adding monoethanolamine into the precursor solution to serve as a stabilizer, wherein the
molar ratio of the monoethanolamine to the LaNiO3 is 0.50-1.50. According to the preparation method, the monoethanolamine modified precursor is added in the
chemical solution deposition process, and the temperature and time of the
rapid thermal annealing process are controlled, so that collaborative optimization of film orientation, thickness and
conductivity is realized, and the LaNiO3 film with high c-axis orientation, large thickness and low resistivity can be prepared on the
silicon substrate; the produced film can be used as a bottom
electrode to induce preferred orientation growth of functional
layers such as BiFeO3 and the like, shows strong ferroelectric performance, is suitable for
silicon-based
integrated devices, and has the characteristics of low cost, simple process and excellent performance.