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A kind of preparation method of graphene/oxide composite optical film

A technology of optical thin film and composite thin film, applied in the direction of solid-state diffusion coating, vacuum evaporation coating, coating, etc., can solve the problems of complex operation, large residue, high cost, etc., and achieve the effect of high surface quality and improved supply efficiency

Active Publication Date: 2019-04-23
又进无尘科技(苏州)有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] At present, the preparation methods of graphene / oxide composite optical films include chemical deposition method, sol-gel, etc., but the above-mentioned preparation methods have problems such as high cost, complicated operation, and many residues.

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  • A kind of preparation method of graphene/oxide composite optical film
  • A kind of preparation method of graphene/oxide composite optical film
  • A kind of preparation method of graphene/oxide composite optical film

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Embodiment 1

[0024] The invention relates to the preparation of graphene / zinc oxide composite optical film on a quartz plate by using a double-layer glow plasma physical sputtering deposition technology through a two-step method. The following two-step process is adopted to realize the preparation of zinc oxide thin film.

[0025] Step 1: Preparation of ZnO thin film

[0026] (1) Pretreatment of the target and substrate: use high-purity zinc (99.99%) as the metal element sputtering source of zinc oxide, pretreat it and the substrate quartz plate with acetone, and then dry it with high-pressure nitrogen; adjust The distance between the substrate and the target frame is kept at 22mm; three electrodes are respectively drawn from the substrate, the target, and the vacuum furnace cavity. Both the substrate and the target are heated by a pulse power supply, and the substrate is heated during the coating process. A layer of plasma glow discharge area is formed on the surface of the target and th...

Embodiment 2

[0032] The invention relates to the preparation of graphene / titanium oxide composite optical film on a quartz plate by using a double-layer glow plasma physical sputtering deposition technology through a two-step method. The following two-step process is adopted to realize the preparation of zinc oxide thin film.

[0033] Step 1: Preparation of TiO thin film

[0034] (1) Pretreatment of target and substrate: high-purity titanium (99.99%) is used as the metal element sputtering source of titanium oxide, and it and the substrate quartz plate (25 mm×25mm) are pretreated with acetone, and then high-pressure Nitrogen drying treatment; adjust the distance between the substrate and the target frame to keep it at 18 mm; draw three electrodes from the substrate, target, and vacuum furnace cavity respectively, and the substrate and target are heated by pulse power , and during the coating process, a layer of plasma glow discharge area is formed on the surface of the substrate and the t...

Embodiment 3

[0040] The invention relates to the preparation of graphene / zinc oxide composite optical film on a quartz plate by using a double-layer glow plasma physical sputtering deposition technology through a two-step method. The following two-step process is adopted to realize the preparation of zinc oxide thin film.

[0041] Step 1: Preparation of ZnO thin film

[0042] (1) Pretreatment of the target and substrate: use high-purity zinc (99.99%) as the metal element sputtering source of zinc oxide, pretreat it and the substrate quartz plate with acetone, and then dry it with high-pressure nitrogen; adjust The distance between the substrate and the target frame is kept at 16mm; three electrodes are respectively drawn from the substrate, the target, and the vacuum furnace cavity. Both the substrate and the target are heated by a pulse power supply, and the substrate is heated during the coating process. A layer of plasma glow discharge area is formed on the surface of the target and th...

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Abstract

The invention discloses a preparing method of a graphene / oxide composite optical thin film. A double-layer glow plasma physical sputtering deposition technology is used on a quartz plate, and through a two-step method, preparation of the graphene / oxide composite optical thin film is achieved. The method specifically comprises the steps that quartz plate acetone cleaning and high-pressure nitrogen drying treatment are carried out. A high-purity low-melting-point metal target and a high-melting-point metal target serve as metal element sputtering sources of oxide, and are washed through acetone, meanwhile, argon and oxygen with a certain proportion are led to serve as metal oxide synthesis atmosphere conditions, a pretreated substrate and a pretreated target material sample are put into a double-layer glow plasma physical sputtering cavity, and a two-step method technology is adopted to achieve preparing of the oxide thin film

Description

technical field [0001] The invention relates to a method for preparing a film, in particular to a method for preparing a graphene / oxide composite optical film, and belongs to the field of film preparation. Background technique [0002] Graphene is made of sp 2 Composed of hybrid carbon atoms, it has excellent optical, electrical and mechanical properties, and it can often play a more outstanding role when combined with semiconductor oxide materials. For example, existing studies have shown that the combination of graphene and inorganic oxide nanoparticles can greatly improve the optoelectronic properties of semiconductor particles by rapidly leading away photogenerated electrons to avoid recombination with holes. For example, zinc oxide is a wide band gap direct band gap compound semiconductor material, which has excellent optical and electrical properties so that zinc oxide can emit blue light or near ultraviolet light, high resistance and high c-axis (002) preferred orien...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/08C23C14/34C23C8/02C23C8/20
CPCC23C8/02C23C8/20C23C14/086C23C14/3485
Inventor 吴红艳赵兴明陈震黄珂鲁小娅张成远
Owner 又进无尘科技(苏州)有限公司