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Manufacturing method of flexible substrate
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A flexible substrate and manufacturing method technology, which is applied in the direction of final product manufacturing, sustainable manufacturing/processing, semiconductor/solid-state device manufacturing, etc., can solve problems such as no record, no record of resin layer or support transmittance, etc. the effect of making
Active Publication Date: 2017-10-20
NIPPON STEEL CHEM &MATERIAL CO LTD
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[0009] In addition, Patent Document 4 discloses that since transparent plastics do not absorb UV laser light, it is necessary to provide an absorption / release layer such as amorphous silicon under the film in advance.
[0010] On the other hand, in Patent Document 5, it is described that when the stress relaxation layer is provided, it is also peeled off by laser light, but there is no description about the transmittance of the resin layer or the support body.
[0011] In addition, Patent Document 6 describes that by forming a resin composition containing an alkoxysilane compound, laser lift-off can be performed without generating particles. However, this Patent Document does not describe the transmittance of the resin layer or the support.
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[0131] Hereinafter, the present invention will be described in detail based on test examples, but the present invention is not limited to the following.
[0132] Abbreviations and measurement methods of various physical properties and their conditions in the test examples are shown below.
[0143] Regarding the transmittance, the transmittance at each wavelength of 300 nm to 800 nm was measured with a spectrophotometer (UV-3600Plus manufactured by Shimadzu Corporation). Table 2 and Table 3 ...
[0148] Under nitrogen flow, 8.9334 g of TFMB was dissolved in 70 g of DMAc as a vehicle in a 300 ml separable flask. Then, 6.0666 g of PMDA was added to this solution, and 85 g of DMAc was added so that the solid content might become 15 wt%, and it stirred at room temperature for 6 hours, and performed the polymerization reaction. After the reaction, a viscous colorless and transparent polyimide precursor solution was obtained. Moreover, the structure of a raw materialmonomer is shown in Table 1 (the following synthesis example is also the same).
[0151] Under nitrogen flow, 8.4914 g of TFMB was dissolved in 70 g of DMAc as a solvent in a 300 ml separable flask. Then, 1.4680 g of 6FDA was added and stirred to this solution, 5.0406 g of PMDA was further added, 85 g of DMAc was added so that the solid content became 15 wt %, and the mixture was stirred at room temperature for 6 hours to conduct a polymerization reaction. After the reaction, a viscous colorless and transparent polyimide precursor solution was obtained.
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Abstract
The invention provides a manufacturing method of a flexible substrate, the method capable of obtaining a flexible substrate easily. The method includes: a coating step of coating one side of a supporting body with light transmittance of above 30% in the presence of a 308nm wavelength with a resin solution; a heating processing step of heating the resin solution together with the supporting body to harden the resin solution, thereby forming a resin layer the light transmittance of which is above 70% in a 440-780nm wavelength region and the light transmittance of which is below 30% in a 355nm wavelength region; a functional layer forming step of forming a functional layer on the resin layer; and a laser separation step of irradiating the other side of the supporting body with laser light with any wavelength in the 300-410nm wavelength region till the resin layer is peeled off the supporting body, so that a flexbile substrate taking the resin layer as a basic material and having the functional layer is obtained.
Description
technical field [0001] The present invention relates to a method for manufacturing a flexible substrate, and in particular, relates to a method for manufacturing a flexible substrate that uses a resin layer as a base material and has a functional layer. Background technique [0002] Display devices such as liquid crystal display devices and organic electroluminescence (EL) display devices are used in various display applications ranging from large displays such as televisions to small displays such as mobile phones, personal computers, and smartphones. As a representative of display devices, there is an organic EL display device. For example, this organic EL display device is produced by forming a thin film transistor (hereinafter, TFT (Thin Film Transistor)) on a glass substrate as a support, and sequentially forming electrodes. , light-emitting layer, electrodes, and finally use another glass substrate or multi-layer film to hermetically seal. [0003] Here, by replacing ...
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