Optical fiber pressure sensor based on micro ellipsoidal air cavity and manufacturing method thereof

A technology of a pressure sensor and a manufacturing method, which is applied in the direction of measurement, instrumentation, and force measurement by measuring the change in optical properties of a material when it is stressed, and can solve the problem of large optical transmission loss, insufficient pressure measurement accuracy, and reflection spectrum fringes Low contrast and other issues, to achieve the effect of low cost, strong realizability, and small temperature crosstalk

Active Publication Date: 2017-10-27
NANJING UNIV OF INFORMATION SCI & TECH
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Problems solved by technology

The thermal expansion coefficient of this optical fiber pressure sensor is consistent and the structure is stable; the formation of the concave cavity on the e

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  • Optical fiber pressure sensor based on micro ellipsoidal air cavity and manufacturing method thereof
  • Optical fiber pressure sensor based on micro ellipsoidal air cavity and manufacturing method thereof
  • Optical fiber pressure sensor based on micro ellipsoidal air cavity and manufacturing method thereof

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Embodiment Construction

[0038] The present invention will be further described below in conjunction with the accompanying drawings. The following examples are only used to illustrate the technical solution of the present invention more clearly, but not to limit the protection scope of the present invention.

[0039] An optical fiber pressure sensor based on a micro-ellipsoid air cavity, comprising a single-mode optical fiber and a pressure-sensitive membrane; the upper end of the single-mode optical fiber is fixedly connected to the lower end of the pressure-sensitive membrane, and the connection between the single-mode optical fiber and the pressure-sensitive membrane Open the air Fabry-Perot cavity.

[0040] Further, the air Fabry-Perot cavity is a micro-ellipsoid, and the air Fabry-Perot cavity is a confocal cavity.

[0041] Further, the cavity length of the air Fabry-Perot cavity is 40 μm-50 μm.

[0042] Further, the thickness of the pressure sensitive film is 6-12 μm.

[0043] Further, the mat...

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Abstract

The present invention relates to an optical fiber pressure sensor based on a micro ellipsoidal air cavity and a manufacturing method of an optical fiber pressure sensor based on a micro ellipsoidal air cavity, belonging to the technical field of optical fiber pressure sensors. The optical fiber pressure sensor comprises a single-mode optical fiber and a pressure-sensitive film; the upper end of the single-mode optical fiber is fixedly connected with the lower end of the pressure-sensitive film; and the single-mode optical fiber and the pressure-sensitive film are connected with an air Fabry-Perot cavity. The materials of the optical fiber pressure sensor are silicon dioxide, so that the thermal expansion coefficients of the optical fiber pressure sensor are the same, thereby avoiding structural failure due to high temperature mismatch of different materials and achieving small temperature crosstalk and low cost. The manufacturing process of the sensor head only needs welding, cutting and grinding, and the process is simple; the confocal Fabry-Perot cavity in the device has the advantages of small interference cavity loss and high interference fringe contrast ratio and high demodulation precision compared with the Fabry-Perot cavity made by the etching process or the femtosecond laser in the prior art.

Description

technical field [0001] The invention relates to an optical fiber pressure sensor based on a micro-ellipsoidal air cavity and a manufacturing method of the optical fiber pressure sensor based on a micro-ellipsoidal air cavity, belonging to the technical field of optical fiber pressure sensors. Background technique [0002] Commonly used fiber optic pressure sensors mainly include fiber grating pressure sensors and fiber optic Fabry-Perot pressure sensors. Compared with the fiber grating pressure sensor, the fiber optic Fabry-Perot pressure sensor is more sensitive to the pressure signal generated by the outside world. Different structural parameters can meet the requirements of different measurement ranges and sensitivities. It is resistant to harsh environments and electromagnetic resistance. Drying, small temperature cross-sensitivity and other advantages. It is used in pressure detection in fields such as biomedicine, high temperature and high pressure oil wells, aerospac...

Claims

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Application Information

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IPC IPC(8): G01L1/24
CPCG01L1/242
Inventor 王婷婷沈娟葛益娴李志鹏
Owner NANJING UNIV OF INFORMATION SCI & TECH
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