Optical fiber pressure sensor based on micro ellipsoidal air cavity and manufacturing method thereof

Abstract

The present invention relates to an optical fiber pressure sensor based on a micro ellipsoidal air cavity and a manufacturing method of an optical fiber pressure sensor based on a micro ellipsoidal air cavity, belonging to the technical field of optical fiber pressure sensors. The optical fiber pressure sensor comprises a single-mode optical fiber and a pressure-sensitive film; the upper end of the single-mode optical fiber is fixedly connected with the lower end of the pressure-sensitive film; and the single-mode optical fiber and the pressure-sensitive film are connected with an air Fabry-Perot cavity. The materials of the optical fiber pressure sensor are silicon dioxide, so that the thermal expansion coefficients of the optical fiber pressure sensor are the same, thereby avoiding structural failure due to high temperature mismatch of different materials and achieving small temperature crosstalk and low cost. The manufacturing process of the sensor head only needs welding, cutting and grinding, and the process is simple; the confocal Fabry-Perot cavity in the device has the advantages of small interference cavity loss and high interference fringe contrast ratio and high demodulation precision compared with the Fabry-Perot cavity made by the etching process or the femtosecond laser in the prior art.

Description

technical field [0001] The invention relates to an optical fiber pressure sensor based on a micro-ellipsoidal air cavity and a manufacturing method of the optical fiber pressure sensor based on a micro-ellipsoidal air cavity, belonging to the technical field of optical fiber pressure sensors. Background technique [0002] Commonly used fiber optic pressure sensors mainly include fiber grating pressure sensors and fiber optic Fabry-Perot pressure sensors. Compared with the fiber grating pressure sensor, the fiber optic Fabry-Perot pressure sensor is more sensitive to the pressure signal generated by the outside world. Different structural parameters can meet the requirements of different measurement ranges and sensitivities. It is resistant to harsh environments and electromagnetic resistance. Drying, small temperature cross-sensitivity and other advantages. It is used in pressure detection in fields such as biomedicine, high temperature and high pressure oil wells, aerospac...

AI Technical Summary

Problems solved by technology

The thermal expansion coefficient of this optical fiber pressure sensor is consistent and the structure is stable; the formation of the concave cavity on the end face of the optical fiber and the fusion with the sensitive film require a two-step process; Time-adjusting pressure measurement accuracy is not high enough

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