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A preparation method of fully printed zinc oxide ultraviolet detector

A technology of ultraviolet detector and zinc oxide, which is applied in the field of photoelectric detection, can solve the problems of expensive magnetron sputtering equipment and high cost of thin film technology, and achieve the effects of low cost, simple preparation method, and reduction of serious discrepancies

Inactive Publication Date: 2019-10-11
HENAN UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the magnetron sputtering equipment is more expensive, and the technical cost of preparing thin films is high

Method used

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  • A preparation method of fully printed zinc oxide ultraviolet detector

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Effect test

Embodiment 1

[0032] Embodiment 1: A kind of preparation method of fully printed zinc oxide ultraviolet detector comprises the following steps:

[0033] A. Pretreat the substrate with ITO transparent conductive film: use acetone, ethanol, and distilled water to ultrasonically clean the substrate respectively: wash with deionized water for 5-15 minutes, acetone for 5-15 minutes, and ethanol for 5 minutes -15 minutes, dry at 100-120°C; after drying, place it in an ultraviolet ozone machine for 30 minutes, wherein the thickness of the ITO film on the substrate with the ITO transparent conductive film is 130nm-140nm;

[0034] B. Place the substrate with the ITO transparent conductive film on the printing platform with heating effect, remove part of the ITO transparent conductive film and form the ITO transparent conductive film groove on the substrate; wherein, the method of printing to form the groove is: The substrate is heated up to 100°C, and then the mixed solution of hydrochloric acid, ci...

Embodiment 2

[0040] Embodiment 2: A kind of preparation method of fully printed zinc oxide ultraviolet detector comprises the following steps:

[0041] A. Pretreat the substrate with ITO transparent conductive film: use acetone, ethanol, and distilled water to ultrasonically clean the substrate respectively: wash with deionized water for 5-15 minutes, acetone for 5-15 minutes, and ethanol for 5 minutes -15 minutes, dry at 100-120°C; after drying, place it in an ultraviolet ozone machine for 30 minutes, wherein the thickness of the ITO film on the substrate with the ITO transparent conductive film is 130nm-140nm;

[0042] B. Place the substrate with the ITO transparent conductive film on the printing platform with heating effect, remove part of the ITO transparent conductive film and form the ITO transparent conductive film groove on the substrate;

[0043]Among them, the method of printing to form grooves is: heating the substrate to 100°C, and then using air jet printing to print a mixed ...

Embodiment 3

[0049] Embodiment 3: A kind of preparation method of fully printed zinc oxide ultraviolet detector comprises the following steps:

[0050] A. Pretreat the substrate with ITO transparent conductive film: use acetone, ethanol, and distilled water to ultrasonically clean the substrate respectively: wash with deionized water for 5-15 minutes, acetone for 5-15 minutes, and ethanol for 5 minutes -15 minutes, dry at 100-120°C; after drying, place it in an ultraviolet ozone machine for 30 minutes, wherein the thickness of the ITO film on the substrate with the ITO transparent conductive film is 130nm-140nm;

[0051] B. Place the substrate with the ITO transparent conductive film on the printing platform with heating effect, remove part of the ITO transparent conductive film and form the ITO transparent conductive film groove on the substrate;

[0052] Among them, the method of printing to form grooves is: heating the substrate to 100°C, and then using air jet printing to print a mixed...

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Abstract

The invention provides a preparation method of a full-print zinc oxide ultraviolet detector. In the preparation method of the zinc oxide ultraviolet detector, a mixed solution of hydrochloric acid, citric acid, polyethylene glycol and water at a proper proportion is adopted; an ITO trench is formed from the mixed solution by directly adopting a printing method; by virtue of the mixed solution, wettability on a substrate can be lowered, and a phenomenon of severe mismatching between a printed pattern and a formed trench pattern caused by difficulty in controlling the pattern edge in side edge corrosion in the ITO corrosion can be reduced; in addition, in the preparation method, nanometer silver ink is printed according to scattered spot shapes; and strong optical absorption is generated bysurface plasma resonance formed between Ag nanoparticles and ZnO. The preparation method is simple, low in cost and high in operability; the ITO trench is formed by adopting the printing method; and therefore, compared with the conventional method for manufacturing an electrode pattern through pattern photoetching and acid corrosion of a conductive layer, the preparation method disclosed in the invention does not generate a large amount of corrosive liquid emission pollution.

Description

technical field [0001] The invention relates to the field of photoelectric detection, and in particular to a method for preparing an all-printed zinc oxide ultraviolet detector. Background technique [0002] Ultraviolet light detection technology is another new detection technology developed after infrared and laser detection technology. Ultraviolet detectors are widely used in national defense, military, astronomy, environmental monitoring, combustion engineering, water purification, flame detection, biological effects, sky In the fields of communication and environmental pollution monitoring, it has extremely high military and civilian values. Especially in national defense applications, ultraviolet early warning based on missile ultraviolet radiation detection has become the research focus of ultraviolet detection. [0003] ZnO is a wide band gap II-VI semiconductor material with a direct band gap. The band gap under the greenhouse is about 3.37eV, and the exciton beam en...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L31/18B82Y30/00
CPCB82Y30/00H01L31/1836Y02P70/50
Inventor 刘汇慧王会娴张利平崔红玲张大伟
Owner HENAN UNIV OF SCI & TECH