Microwave dielectric ceramic material for LTCC (low temperature co-fired ceramic) and preparation method thereof
A technology of microwave dielectric ceramics and dielectric ceramics, which is applied in the field of microwave dielectric ceramics, can solve the problems of selection limitations, restrictions, and inability to achieve balance at the same time, such as the type, quantity, position, and method of substitution ions, and achieve reduction in production costs. Lower sintering temperature and lower cost
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[0032] The preparation method of multi-ion substitution composite microwave dielectric ceramics suitable for LTCC technology provided by the present invention specifically includes the following steps:
[0033] (1) The main crystal phase ceramic powder can be prepared by traditional electronic ceramic powder preparation method and solid state reaction method: Li2CO3 (99wt%), ZnO (99wt%), TiO 2 (99wt%), CoO (99.5wt%), Nb 2 o 5 (99.5wt%) (its raw materials are all provided by Sinopharm Chemical Reagent Co., Ltd.) as the main raw material, according to the molar ratio in the molecular formula, the prepared raw materials are placed in the resin ball mill tank, and zirconia balls and absolute ethanol are added Or deionized water, wherein the mass ratio of zirconia ball: ball grinding material: anhydrous ethanol or deionized water is 1.0-1.5:1:0.5-2.0, ball milled for 20-24 hours, and baked at 1050°C for 2 hour, get Li 2 (Zn 0.92 co 0.08 )(Ti 0.95 Nb 0.05 ) 3 o 8 solid solu...
Embodiment 1
[0040] Select the molar ratio (1-x): x, x=0.1, prepare the composite ceramic powder according to the above process steps, use 8wt% PVA as the binder to granulate, and dry press it into a diameter green body under a pressure of 10MPa Sheets and cylinders with h=5mm, h=7mm, h=9mm, h=12mm, after the debonding treatment at 550°C, the samples were sintered at 950°C in air atmosphere, and after holding for 4 hours, composite ceramics were obtained sample. Both sides of the ceramic sample prepared above were polished, and the dielectric properties were tested. The test results were: εr=25.3, Q×f=112000GHz, τf=-7.2ppm / ℃.
Embodiment 2
[0042] Select the molar ratio (1-x): x, x=0.7, prepare composite ceramic powder according to the above process steps, use 10wt% PVA as the binder to granulate, and dry press it into a diameter green body under 10MPa pressure Sheets and cylinders with h=5mm, h=7mm, h=9mm, and h=12mm, after debonding treatment at 550°C, the samples were sintered at 855°C in an air atmosphere, and after holding for 4 hours, composite ceramics were obtained sample. Both sides of the ceramic sample prepared above were polished, and the dielectric properties were tested. The test results were: εr=13.7, Q×f=90500GHz, τf=8.1ppm / ℃.
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