Graphene-PDMS flexible substrate electrocardiogram dry electrode based on tip array structure and preparation method thereof

Abstract

The invention relates to a graphene-PDMS flexible substrate electrocardiogram dry electrode based on a tip array structure and a preparation method thereof. a graphene-PDMS flexible substrate is designed on a top surface thereof, a paraxylene film is deposited on tip array structure, metal seed layer is sputtered on paraxylene film, a metal lalyer is sputtered on the metal seed layer. The bottom surface of the graphene-PDMS flexible conductive substrate is coated with a conductive silver paste layer. The process of the invention is simple, the cost is low, and the production of the mould is favorable for batch production. The materials such as conductive silver colloid, PDMS, graphene, paraxylene film and sputtered titanium and gold have good biological compatibility, and can effectively inhibit bacteria and reduce skin irritation. The tip array structure designed by the invention has a larger contact area, and can pass through the stratum corneum by directly contacting with the skin,so that contact impedance of the skin-electrode can be effectively reduced, thus obtaining a stable ECG signal.

Description

technical field [0001] The invention relates to the field of medical devices prepared by MEMS technology, in particular to a graphene-PDMS flexible substrate ECG dry electrode based on a needle point array structure and a preparation method thereof. Background technique [0002] At present, polymers have become a widely used processing material in the field of MEMS technology. According to its good biocompatibility, flexibility and ductility, the material has very ideal application prospects in the field of new biological micro-electromechanical sensors. According to the type of material properties, polymers are usually divided into elastomers, conductive polymers, hydrogels, epoxy resins, etc. [0003] Polydimethylsiloxane (PDMS) is a high-molecular silicone polymer, which is widely used in flexible packaging due to its low cost, good chemical inertness, simple processing technology and special material properties. Biological PDMS stamps, microfluidic devices, and biologi...

AI Technical Summary

Problems solved by technology

[0007] Therefore, for the current electrocardiograph wet electrodes coated with conductive paste gradually dry up, resulting in poor fit, poor signal quality, increased contact impedance with the skin and skin irritation, and dry electrodes with poor flexibility, poor conductivity, and poor fit. Due to the problems of poor performance, this design is improved from the aspects of structure and process, and a graphene-PDMS flexible substrate ECG dry electrode array based on needle tip structure and its preparation method are proposed.

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