Composite polishing method based on laser and plasma

A plasma and composite polishing technology, applied in the field of mechanical processing, can solve the problems of low material removal rate, poor processing quality, and low polishing efficiency

Active Publication Date: 2019-02-22
WUHAN UNIV
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  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] However, pure plasma polishing and ultrafast laser polishing each have certain technical limitations
Plasma polishing has a low material removal rate and low polishing efficiency; ultrafast lasers use photochemical decomposi

Method used

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  • Composite polishing method based on laser and plasma

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0051] 1: Take silicon carbide with a surface roughness of about 200nm-300nm, and simply clean and degrease the surface.

[0052] 2: Use a three-dimensional profiler to measure the surface to be polished.

[0053] 3: Put the silicon carbide sample in such as figure 1 On the polishing system workbench 7 of the laser plasma composite polishing system shown, the laser polishing device is set with a laser power of 30 mW, a pulse repetition frequency of 100 Hz, a laser wavelength of 800 nm, a scanning speed of 1 mm / s, and a laser beam incident angle of 50°; plasma polishing device set input power 500W, He flow rate 15L / min, O 2 The flow rate is 0.2SCCM / min. After the plasma polishing device generates a stable plasma discharge, the reaction gas CF is introduced 4 , the reactive gas CF 4 The flow rate is set to 0.15SCCM / min, and the processing system is started to start processing.

[0054] 4: Remove the processed silicon carbide from the workbench, wipe it with absolute alcohol,...

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Abstract

The invention discloses a composite polishing method based on a laser and a plasma. The workpiece to be machined is fixed on the working table of the polishing system, then the laser beam is convergedto the surface of the workpiece to be processed through the laser polishing device to form a laser beam focal spot, and then a normal-pressure plasma beam is generated through the plasma polishing device to impact the surface of the workpiece to be processed to form a plasma impact region; adjusting the laser beam pointing direction and the plasma impact direction to enable the laser beam focal spot to be overlapped with the plasma impact region, and carrying out composite polishing on the surface of the workpiece to be processed; moving the focal spot of the laser beam through a multi-axis moving platform, and the plasma impact composite area finishes the polishing of the whole surface of the workpiece to be machined. According to the method, the modification and composite etching effects of the surface of the material on the surface of the material are achieved by utilizing the plasma in the ultrafast laser processing process, the surface machining quality is improved, and the bottleneck problem that the surface machining quality of the ultrafast laser is not high is solved, so that the high-quality and high-efficiency fine polishing of the surface of the material is realized.

Description

technical field [0001] The invention belongs to the field of mechanical processing and relates to an ultra-precision polishing technology, in particular to a composite polishing method based on laser and plasma. Background technique [0002] In actual production and application, with the rapid development of science and technology, the field of microelectronics and optics and related industries are developing rapidly. Large-scale and ultra-large-scale are important directions for the development of integrated circuits. In order to ensure the quality of subsequent ultra-precision processing, Higher requirements are placed on the surface roughness of the materials used. As the last process of ultra-precision finishing, ultra-precision polishing undertakes the tasks of determining the surface shape of the workpiece, improving the machining accuracy of the workpiece surface, and reducing the machining damage of the workpiece surface. However, for some superhard materials, britt...

Claims

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Application Information

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IPC IPC(8): B24B1/00B23K26/00B24B41/00
Inventor 刘锋程佳瑞箭旗琳潘国顺张臣
Owner WUHAN UNIV
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