Nano-micro-lattice phase separation electric heating material and preparation method thereof
A technology of nanocrystalline and electrothermal materials, applied in heating element materials, nanotechnology, nanotechnology and other directions, can solve problems such as hindering the utilization rate of thermal energy, decrease in heating capacity, small contact area, etc., to improve the efficiency of electrothermal conversion and rapid temperature rise Effect
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[0029] A preparation method for preparing a nano-micro-lattice phase-separated electrothermal material, the preparation method comprising the following steps:
[0030] (1) Wash the silicon substrate with ethanol for 4 times, dry it, heat the substrate until the temperature reaches 600°C, and blow the silicon substrate clean with high-purity nitrogen.
[0031] (2) Water-based silicon carbide composite nano-colloids are obtained by wet ball milling silicon carbide nano-powders, and the water-based colloids are made into micron-scale agglomerated powders by spray granulation process, and the silicon carbide composite nano-powders after spray granulation The body is heat-treated, and the heat-treated silicon carbide is sprayed onto the silicon base to form a transition layer 2 by using a spraying equipment. Since silicon carbide is a semiconductor, the resistance of silicon carbide is high when the temperature is low, but the resistance is low when the temperature is high. In the ...
Embodiment 1
[0040] Example 1: 5mm thick silicon substrate layer 1, 3μm silicon carbide transition layer 2, microlattice electric heating layer 3, the thickness of the tungsten layer is 5nm, the thickness of the titanium layer is 10nm, the thickness of the rare earth oxide layer is 2nm, the microlattice electric heating layer Layer 3 The number of layers is 1 layer, the insulation and heat insulation layer 4 with a thickness of 3mm.
Embodiment 2
[0041] Example 2: 5mm thick silicon base layer 1, 4μm silicon carbide transition layer 2, microlattice electric heating layer 3, the thickness of the tungsten layer is 7nm, the thickness of the titanium layer is 14nm, the thickness of the rare earth oxide layer is 3nm, the microlattice electric heating layer Layer 3 The number of layers is 3 layers, and the insulation and heat insulation layer 4 with a thickness of 3 mm.
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