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Preparation method of adsorbent for removing water molecules in hydrogen fluoride gas

A hydrogen fluoride gas and adsorbent technology, applied in the field of adsorbent preparation, can solve the problems of low water removal efficiency, moisture reduction, cumbersome operation, etc., and achieve the effects of high water removal efficiency, increased porosity, and simple process

Inactive Publication Date: 2019-08-27
ZHEJIANG KAISN FLUOROCHEM
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The disadvantage is that the process introduces CO while reducing moisture 2 and other impurities
The disadvantage is that the operation is cumbersome, the water removal efficiency is low, and the cost is high
The disadvantage is that the water removal efficiency is low and the cost is high

Method used

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  • Preparation method of adsorbent for removing water molecules in hydrogen fluoride gas

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0037] Example 1: (1) Weigh 0.2 kg of potassium fluoride powder and 5.0 kg of titanium fluoride powder, add 1200 g of ultrapure water and 250 g of sodium bifluoride, mix at a stirring speed of 300 rpm for 20 min, and place at 70 ° C Drying at low temperature for 50 minutes to obtain the fluorine-containing double salt particle molded body;

[0038] (2) sintering the fluorine-containing double salt particle molded body obtained in step (1) at 550° C. for 60 minutes to obtain the sintered fluorine-containing double salt particle molded body;

[0039] (3) The sintered fluorine-containing double salt particle molded body obtained in step (2) is ball milled to obtain an adsorbent product with an average particle diameter of 1200 μm.

Embodiment 2

[0040] Example 2: (1) Weigh 0.5 kg of potassium fluoride powder and 5.5 kg of titanium fluoride powder, add 1300 g of ultrapure water and 150 g of sodium bifluoride, mix at 350 rpm for 15 min, and then mix at 72 ° C Drying at low temperature for 45 minutes to obtain the fluorine-containing double salt particle molded body;

[0041] (2) sintering the fluorine-containing double salt particle molded body obtained in step (1) at 650° C. for 100 min to obtain the sintered fluorine-containing double salt particle molded body;

[0042] (3) The sintered fluorine-containing double salt particle molded body obtained in step (2) is ball milled to obtain an adsorbent product with an average particle diameter of 600 μm.

Embodiment 3

[0043] Example 3: (1) Weigh 0.8 kg of sodium fluoride powder and 4.5 kg of ferric fluoride powder, add 1400 g of ultrapure water and 500 g of potassium bifluoride, mix at a stirring speed of 400 rpm for 10 min, and then mix at 75 ° C Drying under high temperature for 40min to obtain the fluorine-containing double salt particle molded body;

[0044] (2) sintering the fluorine-containing double salt particle molded body obtained in step (1) at 750° C. for 20 minutes to obtain the sintered fluorine-containing double salt particle molded body;

[0045] (3) The sintered fluorine-containing double salt particle molded body obtained in step (2) is ball milled to obtain an adsorbent product with an average particle diameter of 300 μm.

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Abstract

The invention discloses a preparation method of an adsorbent for removing water molecules in hydrogen fluoride gas. The method includes the steps that (1) 0.1-2 parts by weight of alkali metal fluoride or alkaline earth metal fluoride, 3.5-5.5 parts by weight of metal fluoride and 0.05-0.5 part by weight of alkali metal fluorohydride are added into ultrapure water, and after stirring and drying, afluorine-containing double-salt particle molded body is obtained; (2) the fluorine-containing double-salt particle molded body is sintered at 500-900 DEG C for 10-120 minutes to obtain a sintered fluorine-containing double salt particle molded body; (3) the sintered fluorine-containing double-salt particle molded body is subjected to ball milling to obtain the adsorbent product. The method has the advantages of simple process, low cost, environmental friendliness and good product performance.

Description

technical field [0001] The invention relates to an adsorbent for separating water molecules in gas, in particular to a preparation method for an adsorbent for removing water molecules in hydrogen fluoride gas. Background technique [0002] The industrial production of hydrogen fluoride (HF) is obtained by heating fluorite (calcium fluoride) and sulfuric acid to react, and the main impurities (including water) are usually removed by fractional distillation, and the purity of the obtained hydrogen fluoride can reach more than 99.8%. However, such The moisture in the prepared hydrogen fluoride gas still has 5-1000ppm, which cannot be applied to the dry etching process of semiconductor manufacturing. In the electronic industry application of hydrogen fluoride, the existence of moisture in hydrogen fluoride has a huge impact on the yield, electrical performance and reliability of integrated circuits. Therefore, the moisture in hydrogen fluoride must be further removed before it ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B01J20/04B01J20/28B01J20/30B01D53/02B01D53/28B01D53/46B01D53/81C01B7/19
CPCB01J20/046B01J20/0288B01J20/0211B01J20/0229B01J20/0248B01J20/28011B01J20/28064B01D53/02B01D53/261B01D53/28B01D53/46B01D53/81C01B7/197B01D2257/80
Inventor 陈刚叶向荣王海贺辉龙赵晓亚程文海
Owner ZHEJIANG KAISN FLUOROCHEM
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